IP Library › Granted Patent US 7,729,049
Granted Patent B2
US 7,729,049 · App. 11/754,282 · Granted Jun 1, 2010

3-d optical microscope

Assignee: Zeta Instruments, Inc.
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Quick Facts
Patent No.
US 7,729,049
App. No.
11/754,282
Granted
Jun 1, 2010
Kind
B2
Abstract

A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.

Claims (12)

1. A method of enhancing an optical microscope to provide three-dimensional imaging, the method comprising:

providing a pattern generator, the pattern generator configured for alternating between projecting a pattern onto and removing the pattern from a focal plane of an objective lens of the optical microscope;

providing a focusing adjustment device for automating objective lens focus adjustment at a plurality of Z steps;

providing an optical sensor capable of acquiring images at each Z step; and

providing a processor for controlling the pattern generator, the focusing adjustment device, and the optical sensor, the processor configured to capture first and second images at multiple Z steps, the first image with the pattern and the second image without the pattern, the processor further configured to generate a depth profile using the first image and one of an image intensity and color values using the second image.

2. The method of claim 1 , wherein the focusing adjustment device includes a motorized mechanism coupled to a fine focus knob of the optical microscope.

3. The method of claim 1 , wherein the optical sensor includes one of a charge-coupled device (CCD) camera and a complementary metal-oxide semiconductor (CMOS) camera.

4. The method of claim 1 , wherein the pattern generator is one of a mechanical pattern generator and an electronic pattern generator.

5. The method of claim 4 , wherein the mechanical pattern generator includes one of a piece of film with a pre-determined pattern and a piece of glass with a pre-determined pattern.

6. The method of claim 4 wherein said electronic pattern generator is a liquid crystal pattern generator or a digital micro-mirror device.

7. The method of claim 1 wherein said means for projecting a pattern onto and removing said pattern from the focal plane of said objective lens is a mechanical pattern generator linked to a motorized actuator.

8. The method of claim 1 , wherein the pattern generator includes a light source capable of being turned on and off electronically.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2018
From: ZETA INSTRUMENTS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 046530/0323 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 12, 2010
From: XU, JAMES JIANGUO; LEE, KEN KINSUN
To: ZETA INSTRUMENTS, INC.
Reel/Frame 024220/0095 →
Continuity (1)
Related Publication 20080291532A1 · Nov 27, 2008