Semiconductor device having elastic solder bump to prevent disconnection
Regarding a semiconductor device, especially the present invention suppresses disconnection of the connection structure concerned in the semiconductor device which has the electric and mechanical connection structure using solder, and aims at improving connection reliability. And to achieve the above objects, the semiconductor device has the solder bump which electrically connects a semiconductor chip and a package substrate, the under-filling resin with which it filled up between the semiconductor chip and the package substrate, and a solder ball which electrically connects a package substrate with the outside, and the solder bump's elastic modulus is made lower than the elastic modulus of a solder ball.
1. A method of manufacturing a semiconductor device, comprising the steps of:
preparing a semiconductor chip including:
a first pad, and
a first solder alloy being provided over the first pad and not including Pb;
preparing a package substrate including:
a second pad being provided over a first surface of the package substrate, and
a second solder alloy being provided over the second pad and not including Pb;
melting and joining the first and second solder alloys to form a solder bump;
providing an under-filling resin between the semiconductor chip and the package substrate; and
forming a solder ball on a second surface of the package substrate, which is opposite to the first surface, the solder ball having an elastic modulus larger than those of the first and second solder alloys before the solder ball is physically connected to another substrate,
wherein both of the solder ball and the solder bump have Ag, Cu, and Sn, and a mass ratio of Ag in the solder bump is lower than that in the solder ball.
2. The method of manufacturing the semiconductor device according to claim 1 , wherein the first and second solder alloys have the same elastic modulus.
3. The method of manufacturing the semiconductor device according to claim 1 , wherein the first and second solder alloys have the same compositions and same composition mass ratio.
4. The method of manufacturing the semiconductor device according to claim 3 , wherein the first and second solder alloys have Ag, Cu, and Sn.
5. The method of manufacturing the semiconductor device according to claim 1 , wherein each of the first and second solder alloys and the solder ball has at least Cu and Sn, and a mass ratio of Ag in the solder alloys is lower than those in the solder ball.