Chemical-mechanical polish termination layer to build electrical device isolation
View Patent ↗A method of forming a semiconductor device may comprise forming a memory portion, forming a carbon film, depositing insulation to at least partially cover the carbon film, and terminating patterned removal of the insulation at the carbon film during a fabrication process.
1. A method of forming a semiconductor device, the method comprising:
forming a phase change memory (PCM) portion;
forming a phase change switch portion;
forming a carbon film disposed between said PCM portion and said phase change switch portion;
depositing insulation to at least partially cover said carbon film; and
terminating patterned removal of said insulation at said carbon film.
2. The method of claim 1 , wherein said carbon film comprises graphitic carbon.
3. The method of claim 2 , wherein said depositing said carbon film further comprises depositing said graphitic carbon using physical vapor deposition (PVD).
4. The method of claim 2 , further comprising:
forming said PCM portion over a row interconnect metal; and
forming a contact electrode on said PCM portion and below said carbon film.
5. The method of claim 1 , wherein said semiconductor device comprises a cross-point structure.
6. The method of claim 1 , wherein a thickness of said carbon film is substantially between 200 and 300 angstroms.
7. The method of claim 1 , wherein said carbon film comprises amorphous carbon.
8. The method of claim 1 , further comprising:
depositing insulation to cover said carbon film; and
removing at least a portion of said insulation using a chemical mechanical polish (CMP) process that auto-terminates at said carbon film.
9. The method of claim 8 , wherein said insulation comprises a dielectric material.
10. The method of claim 1 , wherein said terminating patterned removal of said insulation is performed using a chemical-mechanical polish (CMP) process.
11. The method of claim 10 , wherein said CMP process comprises a CMP process that auto-terminates at said carbon film.
12. The method of claim 1 , wherein a thickness of said carbon film is substantially between 200 and 300 angstroms.
13. A memory device comprising:
a memory cell array comprising a plurality of memory cells, wherein at least one of said memory cells comprises:
a phase chase memory (PCM) portion;
a phase change switch portion electrically contacting said PCM portion; and
a carbon film disposed between said PCM portion and said phase change switch portion; and
insulation disposed adjacent to said carbon film at a level based, at least in part, on a level of a top surface of said carbon film.
14. The memory device of claim 13 , wherein said PCM portion comprises:
a first phase change material between a first memory electrode and a second memory electrode.
15. The memory device of claim 13 , wherein said memory cells are interconnected in a cross-point structure by electrically conducting column lines and row lines.
16. A system comprising:
a memory device comprising a memory controller and a memory cell array, wherein said memory cell array comprises
a plurality of memory cells, wherein at least one of said memory cells comprises a phase chase memory (PCM) portion and a phase change switch portion electrically contacting said PCM portion,
a carbon film disposed between said PCM portion and said phase change switch portion, and
insulation disposed adjacent to said carbon film at a level based, at least in part, on a level of a top surface of said carbon film; and
a processor to host one or more applications and to initiate commands to said memory controller to provide access to said memory cells in said memory cell array through said memory controller.
17. The system of claim 16 , wherein said memory cells are interconnected in a cross-point structure by electrically conducting column lines and row lines.
18. The system of claim 16 , wherein said PCM portion is electrically contacting said row lines and said phase change switch portion is electrically contacting said column lines.
19. The system of claim 18 , wherein said PCM portion comprises:
a first phase change material between a first memory electrode and a second memory electrode.