IP Library Granted Patent US 8,148,206
Granted Patent B2
US 8,148,206 · App. 12/606,585 · Granted Apr 3, 2012

Package for high power integrated circuits and method for forming

Assignee: Freescale Semiconductor, Inc.
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Quick Facts
Patent No.
US 8,148,206
App. No.
12/606,585
Granted
Apr 3, 2012
Kind
B2
Abstract

A method for packaging an integrated circuit comprises the steps of: providing a ground plane, the ground plane having a recessed area shaped to receive an integrated circuit die, wherein the integrated circuit die having a first surface with active circuitry, a second surface, and an edge generally orthogonal to the first and second surfaces; attaching the second surface of the integrated circuit die to a bottom of the recessed area with a thermally conductive adhesive; filling a space between the edge of the integrated circuit die and a side of the recessed area with a fill material; forming an insulating layer on the ground plane and the first surface of the integrated circuit die; patterning the insulating layer to expose contacts on the first surface of the integrated circuit die; and plating electrical conductors on the insulating layer and the contacts.

Claims (43)

1. A method for packaging an integrated circuit, the method comprising:

providing a ground plane, the ground plane having a first side, the first side having a recessed area shaped to receive an integrated circuit die, and a second side opposite the first side, wherein the integrated circuit die having a first surface with active circuitry, a second surface, and an edge generally orthogonal to the first and second surfaces;

attaching the second surface of the integrated circuit die to the recessed area;

filling a space between the edge of the integrated circuit die and the first side of the ground plane with a fill material;

forming an encapsulant layer at least partially over the second side of the ground plane;

forming a first insulating layer on the first side of the ground plane and the first surface of the integrated circuit die;

patterning the first insulating layer to expose contacts on the first surface of the integrated circuit die; and

plating electrical conductors on the first insulating layer and the contacts.

2. The method of claim 1 , further comprising using a stamping process to form the recessed area in the ground plane.

3. The method of claim 1 , wherein the recessed area further comprises a cap portion connected to the ground plane with a plurality of tabs.

4. The method of claim 1 , further comprising forming a second insulating layer over the first insulating layer and over the electrical conductors.

5. The method of claim 1 , wherein the encapsulant layer covers all of the second side of the ground plane.

6. The method of claim 1 , further comprising using a stamping process to form fins and the recessed area on the ground plane.

7. The method of claim 1 , wherein the ground plane is corrugated.

8. The method of claim 1 , wherein the ground plane comprises a metal.

9. The method of claim 1 , further comprising forming solder balls electrically coupled to the electrical conductors.

10. A method for packaging an integrated circuit, the method comprising:

providing a substrate having a surface;

attaching an integrated circuit die to the substrate, the integrated circuit die having a first surface with active circuitry, a second surface, and an edge generally orthogonal to the first and second surfaces;

coupling a ground plane to the substrate and to the second surface of the integrated circuit die, the ground plane having a recessed area shaped to receive the integrated circuit die;

filling a space between the edge of the integrated circuit die and a side of the recessed area with a fill material;

removing the substrate from the integrated circuit die and from the ground plane;

forming an insulating layer on the ground plane and the first surface of the integrated circuit die;

patterning the insulating layer to expose contacts on the first surface of the integrated circuit die; and

plating electrical conductors on the insulating layer and the contacts.

11. The method of claim 10 , wherein coupling the ground plane to the substrate and to the second surface of the integrated circuit die further comprises attaching the second surface of the integrated circuit die to a bottom of the recessed area with a thermally conductive adhesive.

12. The method of claim 10 , further comprising using a stamping process to form the recessed area in the ground plane.

13. The method of claim 10 , wherein the recessed area further comprises a cap portion connected to the ground plane with a plurality of tabs.

14. The method of claim 10 , further comprising forming fins on the ground plane.

15. The method of claim 10 , wherein the ground plane is corrugated.

16. A method for packaging an integrated circuit, the method comprising:

providing a substrate having a planar surface;

contacting an integrated circuit die to the planar surface, the integrated circuit die having a first surface with active circuitry, a second surface, and an edge generally orthogonal to the first and second surfaces;

providing a ground plane, the ground plane having a first side and a second side opposite the first side, the ground plane further comprising a recessed area open on the first side, wherein the recessed area is shaped to receive the integrated circuit die;

contacting a portion of the first side of the ground plane to the planar surface;

coupling the recessed area of the ground plane to the second surface of the integrated circuit die;

removing the integrated circuit die and the ground plane from the substrate;

filling a space between the edge of the integrated circuit die and a side of the recessed area with a fill material; and

forming a patterned interconnect layer over the ground plane and the first surface of the integrated circuit die, the patterned interconnect layer coupled to the first surface of the integrated circuit die.

17. The method of claim 16 , wherein providing the ground plane further comprises providing a ground plane comprising a metal.

18. The method of claim 16 , further comprising forming solder balls electrically coupled to the patterned interconnect layer.

19. The method of claim 16 , further comprising forming an encapsulant layer at least partially over the second side of the ground plane.

20. The method of claim 16 , further comprising forming an encapsulant layer over the second side of the ground plane.

Assignments (19)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037355/0723 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SECURITY AGREEMENT Recorded Mar 15, 2010
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A.
Reel/Frame 024079/0082 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2009
From: SARIHAN, VIJAY
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 023451/0892 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 27, 2009
From: SARIHAN, VIJAY
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 023430/0887 →
Continuity (1)
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