IP Library › Granted Patent US 8,174,762
Granted Patent B2
US 8,174,762 · App. 12/699,824 · Granted May 8, 2012

3-D optical microscope

Assignee: Zeta Instruments, Inc.
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Quick Facts
Patent No.
US 8,174,762
App. No.
12/699,824
Granted
May 8, 2012
Kind
B2
Abstract

A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.

Claims (51)

1. A method of generating a three-dimensional (3-D) image of a sample using an optical microscope, the method comprising:

projecting a pattern onto a focal plane of an objective lens of the optical microscope;

varying a relative distance between the sample and the objective lens at pre-determined steps;

capturing a first set of images of the sample with the pattern at each pre-determined step;

recording the relative distance at each step;

removing the pattern from the focal plane of the objective lens;

repeating varying the relative distance between the sample and the objective lens at the predetermined steps;

capturing a second set of images of the sample without the pattern at each step while still being illuminated;

analyzing the first set of images and the second set of images to extract first cumulative information and second cumulative information, respectively; and

using the first cumulative information and the second cumulative information for generating pixels of the 3-D image.

2. The method of claim 1 , further including resetting image sensor parameters after removing the pattern from the focal plane of the objective lens.

3. The method of claim 1 , wherein analyzing includes:

extracting contrast information from the first set of images;

generating a depth profile of the sample using the contrast information;

extracting image intensity information from the second set of images; and

combining the depth profile and the image intensity information to create the 3-D image of the sample.

4. The method of claim 3 , wherein extracting contrast information includes using a maximum gradient approach.

5. The method of claim 1 , wherein analyzing includes:

extracting contrast information from the first set of images;

generating a depth profile of the sample using the contrast information;

extracting color values from the second set of images; and

combining the depth profile and the color values to create the 3-D image of the sample.

6. The method of claim 5 , wherein extracting contrast information includes using a maximum gradient approach.

7. A method of generating a three-dimensional (3-D) image of a sample using an optical microscope, the method comprising:

varying a relative distance between the sample and an objective lens of the optical microscope at pre-determined steps;

at one or more of the pre-determined steps:

projecting a pattern onto a focal plane of the objective lens;

capturing a first image of the sample with the pattern;

storing the first image in a first image array;

removing the pattern from the focal plane of the objective lens;

capturing a second image of the sample without the pattern; and

storing the second image in a second image array;

generating a depth profile using the first image array;

generating image intensity using the second image array; and

combining the depth profile and the image intensity to generate the 3-D image of the sample.

8. The method of claim 7 , wherein projecting the pattern onto the focal plane is performed by electronic pattern generation.

9. The method of claim 7 , wherein generating the depth profile includes extracting contrast information from the first image array using a maximum gradient approach.

10. A method of generating a three-dimensional (3-D) image of a sample using an optical microscope, the method comprising:

varying a relative distance between the sample and an objective lens of the optical microscope at pre-determined steps;

at one or more of the pre-determined steps:

projecting a pattern onto a focal plane of the objective lens;

capturing a first image of the sample with the pattern;

storing the first image in a first image array;

removing the pattern from the focal plane of the objective lens;

capturing a second image of the sample without the pattern; and

storing the second image in a second image array;

generating a depth profile using the first image array;

generating color values using the second image array; and

combining the depth profile and the color values to generate the 3-D image of the sample.

11. The method of claim 10 , wherein projecting the pattern onto the focal plane is performed by electronic pattern generation.

12. The method of claim 10 , wherein generating the depth profile includes extracting contrast information from the first image array using a maximum gradient approach.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2018
From: ZETA INSTRUMENTS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 046530/0323 →
Continuity (2)
Division 11754282 · May 26, 2007
Related Publication 20100135573A1 · Jun 3, 2010