IP Library › Granted Patent US 8,184,364
Granted Patent B2
US 8,184,364 · App. 12/147,478 · Granted May 22, 2012

Illuminator for a 3-D optical microscope

Assignee: Zeta Instruments, Inc.
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Quick Facts
Patent No.
US 8,184,364
App. No.
12/147,478
Granted
May 22, 2012
Kind
B2
Abstract

A compact and low cost microscope illuminator capable of generating 3-D optical images includes a first light source and a second light source. The two light sources lead two optical paths: one to illuminate a sample and another to project a pattern onto the focal plane of a microscope objective lens. The two light sources are controlled by a processor and can be turned on and off rapidly. A 3-D optical microscope equipped with said microscope illuminator and a method of creating a 3-D image on said 3-D optical microscope are also described.

Claims (9)

1. A microscope capable of generating three-dimensional (3-D) images, said microscope comprising:

a first light source forming part of a first light path;

a second light source and a patterned article forming part of a second light path;

a shared set of components for said first and second light paths, said shared set of components including a first beam-splitter, a lens group, and a second beam-splitter connected in series, said first light source directing light onto said first beam-splitter and said second light source directing light via said patterned article onto said first beam-splitter, a patterned surface of said patterned article being located at an effective focal plane of said lens group, and said lens group imaging said first light source and said second light source at an entrance pupil of a microscope objective lens to simultaneously provide uniform illumination at a sample over an extended two-dimensional (2D) field; and

a multi-pin connector linking electronically to said first light source and said second light source.

2. The microscope illuminator of claim 1 , wherein said lens group includes a double-convex lens and an achromat doublet lens.

3. The microscope illuminator of claim 1 , wherein said second beam-splitter is mounted on a one-dimensional linear slider linked to a pull lever.

4. The microscope illuminator of claim 1 , wherein said patterned article is a piece of glass with a pattern formed on one of its surfaces.

5. The microscope illuminator of claim 1 , wherein said first light source and said second light source are light emitting diodes (LEDs).

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2018
From: ZETA INSTRUMENTS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 046530/0323 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 26, 2011
From: XU, JAMES J.; LEE, KEN K.
To: ZETA INSTRUMENTS, INC.
Reel/Frame 025701/0429 →
Continuity (2)
Continuation In Part 11754282 · May 26, 2007
Related Publication 20080291533A1 · Nov 27, 2008