Semiconductor device with photonics
View Patent ↗A semiconductor structure having a transistor region and an optical device region includes a transistor in a first semiconductor layer of the semiconductor structure, wherein the first semiconductor layer is over a first insulating layer, the first insulating layer is over a second semiconductor layer, and the second semiconductor layer is over a second insulating layer. A gate dielectric of the transistor is in physical contact with a top surface of the first semiconductor layer, and the transistor is formed in the transistor region of the semiconductor structure. A waveguide device in the optical device region and a third semiconductor layer over a portion of the second semiconductor layer.
1. A semiconductor structure, comprising:
a substrate;
a first insulating layer over the substrate;
in a transistor region, a first semiconductor layer over the first insulating layer, a second insulating layer over the first semiconductor layer, a second semiconductor layer over the second insulating layer, and a transistor having a gate dielectric, the gate dielectric over and in physical contact with a top surface of the second semiconductor layer, wherein the first semiconductor layer has a bottom surface and a top surface opposite the bottom surface, and wherein the top surface of the first semiconductor layer is between the bottom surface of the first semiconductor layer and the second insulating layer; and
in an optical device region, a waveguide device over the first insulating layer, wherein the waveguide device has a bottom surface and a top surface opposite the bottom surface, wherein the bottom surface of the waveguide device is substantially coplanar with the bottom surface of the first semiconductor layer, wherein the top surface of the waveguide device has a first portion and a second portion, the second portion being located higher than the first portion with respect to the bottom surface of the waveguide device, wherein the waveguide device comprises a continuous semiconductor material, wherein the second portion of the top surface of the waveguide device is substantially coplanar with the top surface of the second semiconductor layer, and wherein the continuous semiconductor material is epitaxially grown on the second portion.
2. The semiconductor structure of claim 1 , wherein the first portion of the top surface of the waveguide device is substantially coplanar with the top surface of the first semiconductor layer.
3. The semiconductor structure of claim 1 , further comprising an isolation region between the transistor region and optical device region, the isolation region extending to the first insulating layer.
4. The semiconductor structure of claim 1 , further comprising a photodetector over and in physical contact with the second portion of the top surface of the waveguide device.
5. A semiconductor structure having a transistor region and an optical device region, comprising:
a transistor in and on a first semiconductor layer of the semiconductor structure, wherein the first semiconductor layer is over a first insulating layer, the first insulating layer is over a second semiconductor layer, and the second semiconductor layer is over a second insulating layer, wherein a gate dielectric of the transistor is in physical contact with a top surface of the first semiconductor layer, and wherein the transistor is formed in the transistor region of the semiconductor structure; and
a waveguide device in the optical device region of the semiconductor structure, wherein the waveguide device includes a third semiconductor layer epitaxially grown over a portion of the second semiconductor layer in the optical device region.
6. The structure of claim 5 , wherein portions of the first semiconductor layer and the first insulating layer are removed in the optical device region over the portion of the second semiconductor layer.
7. The structure of claim 6 , wherein the waveguide device further comprises:
an opening in the third semiconductor layer that defines a top surface of the waveguide device having a higher portion and a lower portion, wherein the higher portion of the top surface of the waveguide device is higher than the lower portion of the top surface of the waveguide device with respect to the second semiconductor layer.
8. The structure of claim 7 , further comprising:
the opening in the third semiconductor layer is filled with an insulating material.
9. The structure of claim 7 , further comprising:
openings in the first semiconductor layer in the transistor region, wherein the openings are formed prior to forming the transistor.
10. The structure of claim 9 , further comprising:
the openings in the first semiconductor layer and the opening in the third semiconductor layer are filled with an insulating material.
11. The structure of claim 5 , wherein a top surface of the third semiconductor layer is substantially coplanar with the top surface of the first semiconductor layer.
12. The structure of claim 5 , further comprising:
an isolation region formed between the transistor region and the optical device region, wherein the isolation region extends to the second insulating layer.
13. The structure of claim 5 , further comprising:
a photodetector formed over and in physical contact with the waveguide device.
14. The structure of claim 5 , further comprising:
an opening in the optical device region filled with a third insulating layer.
15. The structure of claim 14 , wherein:
portions of the third insulating layer in the optical device region and the first insulating layer in the optical device region are removed to expose the portion of the second semiconductor layer.
16. The structure of claim 14 , further comprising:
openings formed in the first semiconductor layer in the transistor region and the first semiconductor layer is removed in the optical device region.
17. The structure of claim 16 , further comprising:
the openings in the first semiconductor layer are filled with an insulating material.
18. The structure of claim 5 , wherein, prior to the exposing the portion of the second semiconductor layer, the forming the waveguide device further comprises:
removing the first semiconductor layer in the optical device region and the first insulating layer in the optical device region, resulting in an opening; and
filling the opening with a third insulating layer;
wherein the exposing the portion of the second semiconductor layer comprises:
removing portions of the third insulating layer in the optical device region to expose the portion of the second semiconductor layer.
19. A semiconductor structure having a transistor region and an optical device region, comprising:
an isolation region between the transistor region and the optical device region;
a transistor in and on a first semiconductor layer of the semiconductor structure, wherein the first semiconductor layer is over a first insulating layer, the first insulating layer is over a second semiconductor layer, and the second semiconductor layer is over a second insulating layer, wherein a gate dielectric of the transistor is in physical contact with a top surface of the first semiconductor layer, wherein the transistor is formed in the transistor region, and wherein the isolation region extends to the second insulating layer; and
a waveguide device in the optical device region of the semiconductor structure, wherein the waveguide device comprises:
an opening in the first semiconductor layer in the optical device region;
a third insulating layer filling the opening in the first semiconductor layer; and
a third semiconductor layer over the portion of the second semiconductor layer.
20. The structure of claim 19 , wherein a top surface of the third semiconductor layer is substantially coplanar with the top surface of the first semiconductor layer.