Integration of bottom-up metal film deposition

1. A method of depositing a metal-containing film on a substrate with patterned features, said method comprising:

placing a substrate with patterned features into a photo-induced chemical vapor deposition (PI-CVD) process chamber;

depositing a metal-containing film by PI-CVD to fill the patterned features from bottom up; and

performing an annealing on the metal-containing film to densify the metal-containing film and to release residual gaseous compounds from the metal-containing film.

2. The method of claim 1 , wherein the patterned features are filled without voids in the metal-containing film.

3. The method of claim 1 , wherein one of the patterned features is selected from the group consisting of a contact hole, a via hole, a trench, a dual damascene structure, and a replacement gate structure.

4. The method of claim 1 , wherein the metal-containing film is selected from the group consisting of W, Al, Al alloy, Cu, Cu alloy, Ti, Ta, TiN, TaN, Ti/TiN, Ta/TaN, La, Zr, Hf, V, Nb, Re, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, carbides of the above mentioned metals, and the above mentioned metals with Pd impurities.

5. The method of claim 1 , wherein an opening width of the patterned features is equal to or less than about 0.1 μm.

6. The method of claim 1 , wherein a frequency of photons used in the PI-CVD is equal to or less than ultra-violet.

7. The method of claim 1 , wherein the annealing is performed at a temperature range and for a duration that do not change dopant profiles of the substrate and do not damage the films underneath the deposited metal-containing film.

8. The method of claim 7 , wherein the annealing is a technique selected from the group consisting of rapid thermal processing (RTP), spike annealing, and laser annealing.

9. A method of depositing a metal-containing film on a substrate with patterned features said method comprising:

placing a substrate with patterned features into a photo-induced chemical vapor deposition (PI-CVD) process chamber; and

depositing a metal-containing film by PI-CVD to fill the patterned features from bottom up;

wherein a light source of photons used in the PI-CVD is X-ray.

10. The method of claim 1 , further comprising:

introducing a gaseous metal-containing precursor that is either a metal organic compound or a metal halide into the PI-CVD process chamber to deposit the metal-containing film by PI-CVD.

11. The method of claim 1 , wherein the metal-containing film is deposited at a temperature from about room temperature to about 150° C.

12. A method of depositing a metal-containing film on a substrate with patterned features said method comprising:

placing a substrate with patterned features into a photo-induced chemical vapor deposition (PI-CVD) process chamber; and

depositing a metal-containing film by PI-CVD to fill the patterned features from bottom up;

wherein said depositing comprises:

introducing a metal-containing precursor into the process chamber;

generating photons during the PI-CVD, energy of the photons causing metal molecules to break away from the metal-containing precursor; and

depositing the metal molecules on the substrate in a state in which the metal molecules exhibit liquid-like nature and flow into the patterned features to fill the patterned features from bottom up, thereby forming the metal-containing film.

13. The method of claim 12 , wherein the depositing is performed at a temperature from about room temperature to about 150° C. to cause the metal molecules to exhibit liquid-like nature.

14. The method of claim 12 , wherein a frequency of the photons generated during the PI-CVD to cause the metal molecules to break away from the metal-containing precursor is equal to or less than ultra-violet.

15. The method of claim 12 , wherein the photons generated during the PI-CVD to cause the metal molecules to break away from the metal-containing precursor are an X-ray light source.

16. The method of claim 12 , further comprising:

performing an annealing on the metal-containing film to densify the metal-containing film and to release residual gaseous compounds from the metal-containing film.

17. The method of claim 16 , wherein the annealing is performed at a temperature range and for a duration that do not change dopant profiles of the substrate and do not damage the films underneath the deposited metal-containing film.

18. The method of claim 12 , wherein the metal-containing precursor is either a metal organic compound or a metal halide.

19. A method of depositing a metal-containing film on a substrate with patterned features, said method comprising:

placing a substrate with patterned features into a photo-induced chemical vapor deposition (PI-CVD) process chamber;

depositing a metal-containing film by PI-CVD to fill the patterned features from bottom up; and

performing an annealing on the metal-containing film to densify the metal-containing film and to release residual gaseous compounds from the metal-containing film;

wherein

the metal-containing film is deposited at a temperature from about room temperature to about 150° C.;

a frequency of photons used in the PI-CVD is equal to or less than ultra-violet; and

the annealing is performed at a temperature range and for a duration that do not change dopant profiles of the substrate and do not damage the films underneath the deposited metal-containing film.

20. The method of claim 19 , further comprising:

introducing a gaseous metal-containing precursor that is either a metal organic compound or a metal halide into the PI-CVD process chamber to deposit the metal-containing film by PI-CVD.