Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same
Methods of forming a patterned, silicon-enriched developable antireflective material. One such method comprises forming a silicon-enriched developable antireflective composition. The silicon-enriched developable antireflective composition comprises a silicon-enriched polymer and a crosslinking agent. The silicon-enriched polymer and the crosslinking agent are reacted to form a silicon-enriched developable antireflective material that is insoluble and has at least one acid-sensitive moiety. A positive-tone photosensitive material, such as a positive-tone photoresist, is formed over the silicon-enriched developable antireflective material and regions thereof are exposed to radiation. The exposed regions of the positive-tone photosensitive material and underlying regions of the silicon-enriched developable antireflective material are removed. Additional methods are disclosed, as are semiconductor device structures including a silicon-enriched developable antireflective material.
1. A method of forming a patterned, silicon-enriched developable antireflective material, comprising:
forming a silicon-enriched developable antireflective composition soluble in a solvent and comprising a silicon-enriched polymer and a crosslinking agent;
reacting the silicon-enriched polymer and the crosslinking agent to form a silicon-enriched developable antireflective material insoluble in the solvent;
forming a positive-tone photosensitive material over the silicon-enriched developable antireflective material;
exposing regions of the positive-tone photosensitive material to radiation to decouple underlying regions of the silicon-enriched developable antireflective material and render the underlying regions of the silicon-enriched developable antireflective material soluble in the solvent; and
removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material.
2. The method of claim 1 , wherein the silicon-enriched polymer comprises a water-soluble polymer.
3. The method of claim 1 , wherein the silicon-enriched polymer comprises an organo-silicate compound, an organo-siloxane compound, or an organo-silsesquioxane compound.
4. The method of claim 1 , wherein the silicon-enriched developable antireflective composition further comprises a thermal acid generator.
5. The method of claim 1 , wherein the silicon-enriched developable antireflective composition further comprises a thermal acid generator and a photoacid generator.
6. The method of claim 1 , wherein the positive-tone photosensitive material further comprises a photoacid generator.
7. The method of claim 1 , wherein the silicon-enriched developable antireflective composition further comprises a decoupling agent.
8. The method of claim 1 , wherein removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material comprises removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material in a single act.
9. The method of claim 1 , wherein removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material comprises:
removing the exposed regions of the positive-tone photosensitive material using a first solvent; and
removing the underlying regions of the silicon-enriched developable antireflective material using a second solvent.
10. The method of claim 1 , wherein reacting the silicon-enriched polymer and the crosslinking agent comprises reacting the silicon-enriched polymer and the crosslinking agent in the presence of at least one of heat and radiation to form the silicon-enriched developable antireflective material, silicon comprising at least about 17% of a total weight of the silicon-enriched developable antireflective material.
11. The method of claim 1 , wherein exposing regions of the positive-tone photosensitive material to radiation comprises exposing the positive-tone photosensitive material to radiation through an imaging device.
12. The method of claim 1 , wherein exposing regions of the positive-tone photosensitive material to radiation to decouple underlying regions of the silicon-enriched developable antireflective material comprises diffusing acid from the exposed regions of the positive-tone photosensitive material into the underlying regions of the silicon-enriched developable antireflective material.
13. The method of claim 1 , wherein removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material comprises simultaneously removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material using the solvent.
14. The method of claim 1 , wherein removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material comprises simultaneously removing the exposed regions of the positive-tone photosensitive material and the exposed regions of the silicon-enriched developable antireflective material using an aqueous alkaline solution.
15. The method of claim 1 , wherein reacting the silicon-enriched polymer and the crosslinking agent comprises exposing the silicon-enriched polymer and the crosslinking agent to an acid, and wherein exposing regions of the positive-tone photosensitive material to radiation to decouple underlying regions of the silicon-enriched developable antireflective material comprises exposing the underlying regions of the silicon-enriched developable antireflective material to a different acid.
16. The method of claim 15 , wherein exposing the silicon-enriched polymer and the crosslinking agent to an acid comprises generating the acid from a thermal acid generator, and wherein exposing the underlying regions of the silicon-enriched developable antireflective material to a different acid comprises generating the different acid from a photoacid generator.
17. The method of claim 15 , wherein the acid comprises a weaker acid than the different acid.
18. A method of forming a patterned, silicon-enriched developable antireflective coating comprising:
forming a silicon-enriched developable antireflective composition comprising:
a silicon-enriched polymer formulated to be soluble in water; and
a crosslinking agent formulated to react with at least one moiety of the silicon-enriched polymer;
reacting the silicon-enriched polymer and the crosslinking agent to form a silicon-enriched developable antireflective material insoluble in water and having at least one acid-sensitive moiety;
forming a positive-tone photosensitive material over the silicon-enriched developable antireflective material;
exposing regions of the positive-tone photosensitive material to radiation to render the exposed regions of the positive-tone photosensitive material and underlying regions of the silicon-enriched developable antireflective material soluble in at least one aqueous alkaline solution; and
removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material using the at least one aqueous alkaline solution.
19. The method of claim 18 , wherein the silicon-enriched polymer comprises a silicon content of at least about 17% by weight of the silicon-enriched polymer.
20. The method of claim 18 , wherein the silicon-enriched polymer comprises a modified poly(dimethylsiloxane) comprising at least two hydroxyl-terminated oligo(ethylene oxide) moieties grafted on poly(dimethylsiloxane).
21. The method of claim 18 , wherein removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material using the at least one aqueous alkaline solution comprises removing the exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material using aqueous tetramethylammonium hydroxide.
22. The method of claim 18 , further comprising removing regions of the positive-tone photosensitive material not exposed to the radiation.
23. A method of forming a patterned, silicon-enriched antireflective material comprising:
forming a silicon-enriched developable antireflective material comprising a silicon-enriched polymer and a crosslinking agent; and
forming a positive-tone photosensitive material over the silicon-enriched developable antireflective material prior to crosslinking the silicon-enriched developable antireflective material;
exposing regions of the positive-tone photosensitive material to radiation to crosslink regions of the silicon-enriched developable antireflective material underlying the exposed regions of the positive-tone photosensitive material; and
removing non-exposed regions of the positive-tone photosensitive material and other regions of the silicon-enriched developable antireflective material underlying the non-exposed regions of the positive-tone photosensitive material.
24. The method of claim 23 , wherein removing non-exposed regions of the positive-tone photosensitive material and other regions of the silicon-enriched developable antireflective material underlying the non-exposed regions of the positive-tone photosensitive material comprises substantially simultaneously removing the non-exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material using a solvent.
25. A method of forming a patterned, silicon-enriched antireflective coating comprising:
forming a silicon-enriched developable antireflective material comprising a silicon-enriched polymer and a crosslinking agent; and
forming a positive-tone photosensitive material over the silicon-enriched developable antireflective material prior to crosslinking the silicon-enriched developable antireflective material;
exposing regions of the positive-tone photosensitive material to radiation to crosslink underlying regions of the silicon-enriched developable antireflective material;
removing the exposed regions of the positive-tone photosensitive material using a first solvent comprising an aqueous alkaline solution; and
removing non-exposed regions of the positive-tone photosensitive material and regions of the silicon-enriched developable antireflective material under the non-exposed regions of the positive-tone photosensitive material using a second solvent.
26. The method of claim 25 , wherein exposing regions of the positive-tone photosensitive material to radiation to crosslink underlying regions of the silicon-enriched developable antireflective material comprises diffusing acid from the exposed regions of the positive-tone photosensitive material into the underlying regions of the silicon-enriched developable antireflective material.
27. A method of forming a patterned, silicon-enriched antireflective coating comprising:
forming a silicon-enriched developable antireflective composition on a material, the silicon-enriched developable antireflective composition comprising a silicon-enriched polymer and a crosslinking agent;
exposing the silicon-enriched developable antireflective composition to heat to form a silicon-enriched developable antireflective material;
forming a positive-tone photosensitive composition over the silicon-enriched developable antireflective material;
exposing the positive-tone photosensitive composition to heat to form a positive-tone photosensitive material;
exposing regions of the positive-tone photosensitive material to radiation;
removing the exposed regions of the positive-tone photosensitive material to expose underlying regions of the silicon-enriched developable antireflective material;
forming a freeze overcoat over the non-exposed regions of the positive-tone photosensitive material and the underlying regions of the silicon-enriched developable antireflective material;
crosslinking the exposed regions of the silicon-enriched developable antireflective material; and
removing the freeze overcoat, the non-exposed regions of the positive-tone photosensitive material and non-crosslinked regions of the silicon-enriched developable antireflective material.
28. The method of claim 27 , wherein exposing the silicon-enriched developable antireflective composition to heat to form a silicon-enriched developable antireflective material comprises exposing the silicon-enriched developable antireflective composition to a temperature sufficient to remove a casting solvent but not crosslink the silicon-enriched polymer.
29. The method of claim 27 , wherein forming a positive-tone photosensitive composition over the silicon-enriched developable antireflective material comprises forming the positive-tone photosensitive composition before crosslinking the silicon-enriched developable antireflective composition.
30. The method of claim 27 , wherein forming a positive-tone photosensitive composition over the silicon-enriched developable antireflective material comprises forming the positive-tone photosensitive composition in a solvent in which the silicon-enriched developable antireflective material is insoluble.
31. The method of claim 27 , wherein crosslinking the exposed regions of the silicon-enriched developable antireflective material comprises diffusing an acid catalyst from the freeze overcoat into the exposed regions of the silicon-enriched developable antireflective material.