Semiconductor element-embedded wiring substrate
A wiring substrate in which a semiconductor element is built includes a semiconductor element; a peripheral insulating layer covering at least an outer circumferential side surface of this semiconductor element; and an upper surface-side wiring line provided on the upper surface side of the wiring substrate. The semiconductor element includes an internal terminal electrically connected to the upper surface-side wiring line on the upper surface side of the semiconductor element. This internal terminal includes a first conductive part exposed out of an insulating surface layer of the semiconductor element; an adhesion layer on this first conductive part; and a second conductive part on this adhesion layer. The adhesion layer covers an exposed surface of the first conductive part, and is formed on a portion of the insulating surface layer around the exposed surface of the first conductive part, and the adhesion layer extends around the outer side of an outer edge of this second conductive part so as to surround the second conductive part.
1. A wiring substrate in which a semiconductor element is built, the wiring substrate comprising:
a semiconductor element;
a peripheral insulating layer covering at least an outer circumferential side surface of the semiconductor element; and
an upper surface-side wiring line provided on the upper surface side of the wiring substrate,
wherein the semiconductor element includes, on the upper surface side thereof, an internal terminal electrically connected to the upper surface-side wiring line,
the internal terminal includes:
a first conductive part exposed out of an insulating surface layer of the semiconductor element;
an adhesion layer on the first conductive part; and
a second conductive part on the adhesion layer, and
the adhesion layer covers an exposed surface of the first conductive part, and is formed on a portion of the insulating surface layer around the exposed surface of the first conductive part, and the adhesion layer extends around the outer side of an outer edge of the second conductive part so as to surround the second conductive part.
2. The wiring substrate according to claim 1 , wherein the first conductive part, the adhesion layer and the second conductive part are respectively made of metal materials, and the insulating surface layer is made of a resin material.
3. The wiring substrate according to claim 1 , wherein the adhesion layer is made of a metal material comprising a metal selected from the group consisting of Ti, W, Mo, Cr, V, Ta and Ni.
4. The wiring substrate according to claim 1 , wherein the second conductive part is made of a metal material comprising a metal selected from the group consisting of gold, silver, copper, nickel, tin and palladium.
5. The wiring substrate according to claim 1 , wherein the second conductive part is made of copper or a copper-based alloy.
6. The wiring substrate according to claim 1 , wherein the semiconductor element includes a plurality of the internal terminals and includes adjacent internal terminals sharing an integrally-formed adhesion layer.
7. The wiring substrate according to claim 6 , wherein the plurality of the internal terminals includes adjacent power supply terminals sharing the integrally-formed adhesion layer.
8. The wiring substrate according to claim 6 , wherein the plurality of the internal terminals includes adjacent ground terminals sharing the integrally-formed adhesion layer.
9. The wiring substrate according to claim 1 , wherein the second conductive part is shaped such that the peripheral length of the outer edge of the lower surface of the second conductive part in contact with the adhesion layer is greater than the peripheral length of the outer edge of the upper-surface of the second conductive part and that the peripheral length of the outer edge of a cross section of the second conductive part along the planar direction of the wiring substrate gradually increases in a direction from the upper surface side to the lower surface side thereof.
10. The wiring substrate according to claim 1 , wherein the first conductive part is part of a wiring line underneath the insulating surface layer and is a portion of the wiring line exposed out of an opening of the insulating surface layer.
11. The wiring substrate according to claim 1 , wherein the first conductive part is a conductive part provided in an opening of the insulating surface layer.
12. The wiring substrate according to claim 1 , further comprising a base insulating layer, wherein the semiconductor element and the peripheral insulating layer are provided on the upper surface side of the base insulating layer.
13. The wiring substrate according to claim 1 , further comprising a protective insulating film covering the upper surface-side wiring line,
wherein the protective insulating film includes an opening, and the wiring substrate comprises an external terminal made of a portion of the upper surface-side wiring line exposed in the opening, or an external terminal made of a conductive part provided in the opening.
14. The wiring substrate according to claim 1 , further comprising an upper surface-side wiring structure layer including wiring lines and insulating layers alternately provided on the upper surface side of the wiring substrate,
wherein the uppermost layer-side insulating layer includes an opening, and the wiring substrate comprises an external terminal made of a portion of a wiring line exposed in the opening, or an external terminal made of a conductive part provided in the opening.
15. The wiring substrate according to claim 1 , further comprising a lower surface-side wiring line provided on the lower surface side of the wiring substrate.
16. The wiring substrate according to claim 15 , further comprising, in the peripheral insulating layer, a lateral-to-element via electrically connected to the upper surface-side wiring line and the lower surface-side wiring line.
17. The wiring substrate according to claim 15 , further comprising a protective insulating film covering the lower surface-side wiring line,
wherein the protective insulating film includes an opening, and the wiring substrate comprises an external terminal made of a portion of the lower surface-side wiring line exposed in the opening, or an external terminal made of a conductive part provided in the opening.
18. The wiring substrate according to claim 15 , further comprising a lower surface-side wiring structure layer including wiring lines and insulating layers alternately provided on the lower surface side of the wiring substrate,
wherein the lowermost layer-side insulating layer includes an opening, and the wiring substrate comprises an external terminal made of a portion of a wiring line exposed in the opening, or an external terminal made of a conductive part provided in the opening.
19. The wiring substrate according to claim 1 , further comprising a supporting substrate provided on the lower surface side of the wiring substrate.
20. The wiring substrate according to claim 1 , wherein a noise-shielding circuit pattern is provided on the lower surface of the semiconductor element with an intervention of an insulating adhesive material.
21. The wiring substrate according to claim 1 , wherein a potential-stabilizing circuit pattern is provided on the lower surface of the semiconductor element with an intervention of a conductive adhesive material.