Vapor deposition reactor and method for forming thin film
A vapor deposition reactor and a method for forming a thin film. The vapor deposition reactor includes at least one first injection portion for injecting a reacting material to a recess in a first portion of the vapor deposition reactor. A second portion is connected to the first space and has a recess connected to the recess of the first portion. The recess of the second portion is maintained to have pressure lower than the pressure in the first space. A third portion is connected to the second space, and an exhaust portion is connected to the third space.
1. A vapor deposition reactor comprising:
a first portion of a body formed with a first recess for receiving a reaction material, the first portion of the body having a first bottom surface defining the first recess and facing a substrate passing below the vapor deposition reactor, the first recess subject to a first pressure of the reaction material and formed within the first portion at a lower side of the body;
a second portion of the body adjacent to the first portion of the body, the second portion formed with a second recess communicatively connected to the first recess, the second portion of the body having a second bottom surface defining the second recess and facing the substrate, the second recess subject to a second pressure of the reaction material lower than the first pressure by having a height not greater than ⅔ of a width of the first recess, the height representing a vertical distance between a lowest surface of the body and the second bottom surface; and
a third portion of the body adjacent to the second portion of the body, the third portion communicatively connected to the second portion of the body to discharge the reaction material from the vapor deposition reactor, the second portion bounded at sides by the first and third portions.
2. The vapor deposition reactor according to claim 1 , wherein a width of the second portion is greater than a half of a height of the second recess.
3. The vapor deposition reactor according to claim 1 , wherein the height of the second recess is not greater than ⅓ of a height of the first recess.
4. The vapor deposition reactor according to claim 1 , wherein the width of the third portion is greater than the height of the second recess.
5. The vapor deposition reactor according to claim 1 , wherein the third portion is subject to a third pressure lower than the first pressure.
6. The vapor deposition reactor according to claim 1 , further comprising a first adjustable wing configured to at least partially change the height of the second recess.
7. The vapor deposition reactor according to claim 1 , further comprising a second adjustable wing configured to change the ratio of the height of the second recess with respect to the width of the first recess.
8. The vapor deposition reactor according to claim 1 , wherein the reacting material comprises a source precursor and a reactant precursor for performing atomic layer deposition (ALD).
9. The vapor deposition reactor according to claim 8 , wherein the source precursor comprises an inorganic compound and an organic compound.
10. The vapor deposition reactor according to claim 8 , wherein the reactant precursor comprises one or more selected from the group consisting of H 2 O, H 2 O 2 , O 2 , N 2 O, NO, O 3 , O* radical, NH 3 , NH 2 —NH 2 , N* radical, CO, CO 2 , CH 4 , C 2 H 6 , H 2 and H* radical.
11. The vapor deposition reactor according to claim 1 , wherein the first injection portion further injects an inert gas into the first recess.
12. The vapor deposition reactor according to claim 11 , wherein the inert gas comprises one or more selected from the group consisting of N 2 , Ar and He.
13. The vapor deposition reactor according to claim 1 , further comprising at least one second injection portion connected to the first recess and configured to inject an inert gas to the first recess.
14. The vapor deposition reactor according to claim 13 , wherein the inert gas comprises one or more selected from the group consisting of N 2 , Ar and He.
15. The vapor deposition reactor according to claim 1 , wherein the first portion comprises a plurality of first recesses, and the second portion comprises a plurality of second recesses.
16. The vapor deposition reactor according to claim 1 , wherein the reaction material is a precursor, inert gas, radical or mixture thereof.
17. The vapor deposition reactor according to claim 1 , wherein the height of the second recess is not greater than ⅓ of the width of the first recess.
18. The vapor deposition reactor according to claim 1 , wherein a distance between the substrate to the vapor deposition reactor is 0.5 mm to 3 mm.