Active tiling placement for improved latch-up immunity
View Patent ↗A semiconductor device includes CMP dummy tiles ( 36 ) that are converted to active tiles by forming well regions ( 42 ) at a top surface of the dummy tiles, forming silicide ( 52 ) on top of the well regions, and forming a metal interconnect structure ( 72, 82 ) in contact with the silicided well tie regions for electrically connecting the dummy tiles to a predetermined supply voltage to provide latch-up protection.
1. A method for making a semiconductor device, comprising:
providing a semiconductor substrate of a first conductivity type comprising a plurality of tiles that are spaced apart between active circuit areas;
forming one or more isolation regions on the semiconductor substrate between the active circuit areas by performing chemical mechanical polishing on an insulating material using the plurality of tiles to promote planar chemical mechanical polishing of the insulating material between the active circuit areas;
forming at a top surface of each of the plurality of tiles a corresponding plurality of well tie structures of the first conductivity type:
forming a first metal interconnect structure in contact with a first plurality of well tie structures for electrically connecting a first plurality of tiles to a first predetermined supply voltage to provide latch-up protection; and
forming a second metal interconnect structure in contact with a second plurality of well tie structures for electrically connecting a second plurality of tiles to a second predetermined supply voltage to provide latch-up protection,
where the first plurality of tiles comprise N+ substrate regions located in close proximity to n-type emitter circuits.
2. The method of claim 1 ,
where forming one or more isolation regions comprises:
depositing an insulating material to cover the plurality of tiles and fill a plurality of shallow trench openings formed in the semiconductor substrate between the active circuit areas; and
planarizing the insulating material by performing chemical mechanical polishing using the plurality of tiles to promote uniform polishing of the insulating material to form planar shallow trench isolation regions between the active circuit areas.
3. The method of claim 1 ,
where forming the plurality of well tie structures comprises
forming at a top surface of each of the plurality of well tie structures a silicide layer.
4. The method of claim 1 ,
where forming the plurality of well tie structures comprises
forming the second plurality of well tie structures as a plurality of heavily doped p-regions in a plurality of p-type tiles that are formed from the semiconductor substrate and have relatively lighter doping.
5. The method of claim 4 , where forming the second metal interconnect structure comprises forming a metal interconnect structure in conductive contact with the plurality of heavily doped p-regions for electrically connecting the plurality of tiles to a ground supply voltage.
6. The method of claim 1 ,
where forming the plurality of well tie structures comprises
forming the first plurality of well tie structures as a plurality of heavily doped n-regions in a plurality of n-type tiles that are formed from the semiconductor substrate and have relatively lighter doping.
7. The method of claim 6 , where forming the first metal interconnect structure comprises forming a metal interconnect structure in conductive contact with the plurality of heavily doped n-regions for electrically connecting the plurality of tiles to a power supply voltage.
8. A method for making a semiconductor device, comprising:
providing a semiconductor substrate of a first conductivity type comprising a plurality of tiles that are spaced apart between active circuit areas;
forming one or more isolation regions on the semiconductor substrate between the active circuit areas by performing chemical mechanical polishing on an insulating material using the plurality of tiles to promote planar chemical mechanical polishing of the insulating material between the active circuit areas;
forming at a to surface of each of the plurality of tiles a corresponding plurality of well tie structures of the first conductivity type;
forming a first metal interconnect structure in contact with a first plurality of well tie structures for electrically connecting a first plurality of tiles to a first predetermined supply voltage to provide latch-up protection; and
forming a second metal interconnect structure in contact with a second plurality of well tie structures for electrically connecting a second plurality of tiles to a second predetermined supply voltage to provide latch-up protection,
where the second plurality of tiles comprise P+ substrate regions located in close proximity to p-type emitter circuits.
9. The method of claim 8 ,
where forming one or more isolation regions comprises:
depositing an insulating material to cover the plurality of tiles and fill a plurality of shallow trench openings formed in the semiconductor substrate between the active circuit areas; and
planarizing the insulating material by performing chemical mechanical polishing using the plurality of tiles to promote uniform polishing of the insulating material to form planar shallow trench isolation regions between the active circuit areas.
10. The method of claim 8 ,
where forming the plurality of well tie structures comprises
forming at a top surface of each of the plurality of well tie structures a silicide layer.
11. The method of claim 8 ,
where forming the plurality of well tie structures comprises
forming the second plurality of well tie structures as a plurality of heavily doped p-regions in a plurality of p-type tiles that are formed from the semiconductor substrate and have relatively lighter doping.
12. The method of claim 11 ,
where forming the second metal interconnect structures comprises
forming a metal interconnect structure in conductive contact with the plurality of heavily doped p-regions for electrically connecting the plurality of tiles to a ground supply voltage.
13. The method of claim 8 ,
where forming the plurality of well tie structures comprises
forming the first plurality of well tie structures as a plurality of heavily doped n-regions in a plurality of n-type tiles that are formed from the semiconductor substrate and have relatively lighter doping.
14. The method of claim 13 ,
where forming the first metal interconnect structures comprises
forming a metal interconnect structure in conductive contact with the plurality of heavily doped n-regions for electrically connecting the plurality of tiles to a power supply voltage.