Polymer, method for producing the same, and resist composition containing the same
Provided is a copolymer. The copolymer, when incorporated into a resist composition, can provide a satisfactory resist pattern with high sensitivity, high resolution, high etching resistance and a reduced amount of outgas.
1. A copolymer having a main chain comprising a repeating unit represented by the following formula (1):
wherein R1 represents any one selected from the group consisting of an alkanediyl group, a heteroalkanediyl group, a cycloalkanediyl group, a heterocycloalkanediyl group, an arylene group, a heteroarylene group, and an alkylarylene group;
R2 represents any one selected from the group consisting of a hydrogen atom, an alkyl group, a heteroalkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, a heteroaryl group, an alkoxy group and an alkylalkoxy group;
R3, R4, R5 and R6 each independently represent any one selected from the group consisting of a hydrogen atom and an alkyl group having 1 to 5 carbon atoms;
n1 represents an integer from 0 to 10; and
n2 represents an integer from 0 to 10.
2. The copolymer according to claim 1 , wherein R1 represents any one selected from the group consisting of moieties represented by the following formulas (1-1) to (1-4):
wherein in the formulas (1-1) to (1-4),
Ra1, Rb1, Rb2, Rc1, Rc2 and Rd1 each independently represent any one selected from the group consisting of an alkyl group having 1 to 10 carbon atoms and an alkoxy group having 1 to 10 carbon atoms;
R10 represents any one selected from the group consisting of O, NR′, S and CO;
R′ represents any one selected from the group consisting of a hydrogen atom and an alkyl group having 1 to 5 carbon atoms;
P11 represents an integer from 1 to 14;
P21 and P22 each independently represent an integer from 1 to 4, and the sum of P21 and P22 is not greater than 6;
P31 and P32 each independently represent an integer from 1 to 5, and the sum of p31 and p32 is not greater than 8; and
P41 represents an integer from 1 to 4.
3. The copolymer according to claim 1 , wherein the copolymer has a weight average molecular weight as measured by gel permeation chromatography of 500 to 100,000 g/mol.
4. A method for producing a copolymer having a main chain containing a repeating unit represented by the following formula (1), the method comprising allowing a compound represented by the following formula (2) and a compound represented by the following formula (3) to react in the presence of a basic catalyst:
wherein in the formulas (1) to (3),
R1 represents any one selected from the group consisting of an alkanediyl group, a heteroalkanediyl group, a cycloalkanediyl group, a heterocycloalkanediyl group, an arylene group, a heteroarylene group, and an alkylarylene group;
R2 represents any one selected from the group consisting of a hydrogen atom, an alkyl group, a heteroalkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, a heteroaryl group, an alkoxy group and an alkylalkoxy group;
R3, R4, R5 and R6 each independently represent any one selected from the group consisting of a hydrogen atom and an alkyl group having 1 to 5 carbon atoms;
X1 and X2 each independently represent any one selected from the group consisting of a halogen atom and an alkoxy group having 1 to 10 carbon atoms;
n1 represents an integer from 0 to 10; and
n2 represents an integer from 0 to 10.
5. The method for producing a copolymer according to claim 4 containing a repeating unit represented by the formula (1), wherein the basic catalyst is any one selected from the group consisting of an amine, a pyridine and combinations thereof.
6. The method for producing a copolymer according to claim 4 containing a repeating unit represented by the formula (1), wherein the compound of formula (2) and the compound of formula (3) are used at a molar ratio of 1:0.5 to 1:3.0.