IP Library Granted Patent US 8,912,052
Granted Patent B2
US 8,912,052 · App. 13/355,369 · Granted Dec 16, 2014

Semiconductor device and structure

Inventor: Zvi Or-Bach (San Jose, CA)
Assignee: Monolithic 3D Inc.
H01L21/8226G11C17/14H01L21/76254H01L21/8221H01L21/84H01L23/5252H01L23/544H01L25/0657H01L25/18H01L27/0207H01L27/0688H01L27/0694H01L27/092H01L27/105H01L27/10873H01L27/10876H01L27/10897H01L27/11H01L27/112H01L27/11206H01L27/11803H03K17/687H03K19/0948H03K19/177H01L27/1108H01L2223/5442H01L2223/54426H01L2223/54453H01L2224/32145H01L2224/48091H01L2225/06513H01L2225/06517H01L2225/06527H01L2225/06541H01L2225/06589H01L2924/3011H01L2924/01066H01L2924/01322H01L24/48H01L2924/01019H01L2924/13091H01L2224/45124H01L2924/10253H01L2924/3025
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Quick Facts
Patent No.
US 8,912,052
App. No.
13/355,369
Granted
Dec 16, 2014
Kind
B2
Abstract

A semiconductor device, including: a first layer including monocrystalline material and first transistors, the first transistors overlaid by a first isolation layer; a second layer including second transistors and overlaying the first isolation layer, the second transistors including a monocrystalline material; at least one contact to the second transistors, where the at least one contact is aligned to the first transistors with less than about 40 nm alignment error, a first set of external connections underlying the first layer to connect the device to external devices; and a second set of external connections overlying the second layer to connect the device to external devices.

Claims (59)

1. A semiconductor device, comprising:

a first layer comprising monocrystalline material and first transistors, said first transistors overlaid by a first isolation layer;

a second layer comprising second transistors and overlaying said first isolation layer, said second transistors comprising a monocrystalline material;

at least one contact to said second transistors,

wherein said at least one contact is aligned to said first transistors with less than about 40 nm alignment error,

a first set of external connections underlying said first layer to connect said device to external devices;

a second set of external connections overlying said second layer to connect said device to external devices; and

an interconnection layer in-between said first layer and said second layer,

wherein said interconnection layer comprises copper or aluminum.

2. The semiconductor device according to claim 1 ,

wherein said second transistors comprise P type transistors and N type transistors.

3. The semiconductor device according to claim 1 , further comprising:

a back-bias structure for at least one of said second transistors.

4. The semiconductor device according to claim 1 ,

wherein said second layer comprises a node for wireless connection to external devices.

5. The semiconductor device according to claim 1 ,

wherein said first set of external connections comprise through-silicon-vias (“TSV”).

6. The semiconductor device according to claim 1 ,

wherein said second set of external connections comprise micro-bumps.

7. The semiconductor device according to claim 1 ,

wherein said second transistors are horizontally oriented transistors.

8. A semiconductor device, comprising:

a first layer comprising monocrystalline material and first transistors, said first transistors overlaid by a first isolation layer;

a second layer comprising second transistors and overlaying said first isolation layer, said second transistors comprising a monocrystalline material;

at least one contact to said second transistors,

wherein said at least one contact is aligned to said first transistors with less than about 40 nm alignment error,

a first set of external connections underlying said first layer to connect said device to external devices; and

a second set of external connections overlying said second layer to connect said device to external devices,

wherein said second layer comprises a node for wireless connection to external devices.

9. The semiconductor device according to claim 8 ,

wherein said second transistors comprise P type transistors and N type transistors.

10. The semiconductor device according to claim 8 , further comprising:

a back-bias structure for at least one of said second transistors.

11. The semiconductor device according to claim 8 , further comprising:

an interconnection layer in-between said first layer and said second layer,

wherein said interconnection layer comprises copper or aluminum.

12. The semiconductor device according to claim 8 ,

wherein said first set of external connections comprise through-silicon-vias (“TSV”).

13. The semiconductor device according to claim 8 ,

wherein said second set of external connections comprise micro-bumps.

14. The semiconductor device according to claim 8 ,

wherein said second transistors are horizontally oriented transistors.

15. A semiconductor device, comprising:

a first layer comprising monocrystalline material and first transistors, said first transistors overlaid by a first isolation layer;

a second layer comprising second transistors and overlaying said first isolation layer, said second transistors comprising a monocrystalline material;

at least one contact to said second transistors,

wherein said at least one contact is aligned to said first transistors with less than about 40 nm alignment error,

a first set of external connections underlying said first layer to connect said device to external devices; and

a second set of external connections overlying said second layer to connect said device to external devices.

16. The semiconductor device according to claim 15 ,

wherein said second transistors comprise P type transistors and N type transistors.

17. The semiconductor device according to claim 15 , further comprising:

a back-bias structure for at least one of said second transistors.

18. The semiconductor device according to claim 15 , further comprising:

an interconnection layer in-between said first layer and said second layer,

wherein said interconnection layer comprises copper or aluminum.

19. The semiconductor device according to claim 15 , wherein said first set of external connections comprise through-silicon-vias (“TSV”).

20. The semiconductor device according to claim 15 ,

wherein said second transistors are horizontally oriented transistors.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2026
From: MONOLITHLC 3D™ INC.
To: SAMSUNG ELECTRONICS CO. , LTD.
Reel/Frame 073397/0890 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2022
From: SAMSUNG ELECTRONICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 058625/0664 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 8, 2020
From: MONOLITHIC 3D INC.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 054576/0686 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 14, 2013
From: OR-BACH, ZVI
To: MONOLITHIC 3D INC.
Reel/Frame 029624/0127 →
Continuity (5)
Continuation 13314435 · Dec 8, 2011
Continuation 13246391 · Sep 27, 2011
Continuation 13083802 · Apr 11, 2011
Continuation 12847911 · Jul 30, 2010
Related Publication 20130021060A1 · Jan 24, 2013