Semiconductor device with reduced contact resistance and method of manufacturing thereof
View Patent ↗A method (and semiconductor device) of fabricating a semiconductor device provides a filed effect transistor (FET) with reduced contact resistance (and series resistance) for improved device performance. An impurity is implanted in the source/drain (S/D) regions after contact silicide formation and a spike anneal process is performed that lowers the schottky barrier height (SBH) of the interface between the silicide and the lower junction region of the S/D regions. This results in lower contact resistance and reduces the thickness (and Rs) of the region at the silicide-semiconductor interface.
1. A semiconductor device comprising:
a semiconductor substrate of a first conductivity type; and
a field-effect transistor (FET) structure formed on the substrate, the FET structure comprising,
a gate stack including a gate dielectric and a gate electrode,
a first source/drain (S/D) region and a second S/D region each of a second conductivity type, each of the S/D regions having a contact region including metal silicide disposed therein,
a segregation region disposed between the contact region and a junction region, and
an impurity disposed in the first and second S/D regions, wherein the impurity is higher in concentration in the segregation region than in the contact region and the junction region.
2. The device in accordance with claim 1 wherein the impurity is nitrogen.
3. The device in accordance with claim 1 wherein the impurity is chlorine.
4. The device in accordance with claim 1 wherein the metal silicide comprises a silicide of nickel.
5. The device in accordance with claim 1 wherein the metal silicide comprises a silicide of titanium.
6. The device in accordance with claim 1 wherein the metal silicide is formed from a metal comprising nickel and platinum.
7. The device in accordance with claim 1 wherein the concentration of impurity is a bell-shaped curve having a peak, with the peak of the curve centered about the segregation region.
8. A semiconductor device comprising:
a semiconductor substrate of a first conductivity type; and
a field-effect transistor (FET) structure formed on the substrate, the FET structure comprising,
a gate stack including a gate dielectric and a gate electrode,
a first source/drain (S/D) region and a second S/D region each of a second conductivity type, each of the S/D regions having a contact region including metal silicide disposed therein,
a segregation region disposed between the contact region and a junction region, and
an impurity disposed in the first and second S/D regions, wherein the impurity is higher in concentration in the segregation region than in the contact region and the junction region, and wherein the concentration of impurity resembles a bell-shaped curve with a bell centered about the segregation region.
9. The device in accordance with claim 8 wherein the impurity is at least a one of nitrogen or chlorine.
10. The device in accordance with claim 8 wherein the metal silicide comprises at least a silicide of nickel or titanium.
11. The device in accordance with claim 8 wherein a peak of the bell-shaped curve is centered about the segregation region.
12. A semiconductor device comprising:
a semiconductor substrate of a first conductivity type; and
a field-effect transistor (FET) structure formed on the substrate, the FET structure comprising,
a gate stack including a gate dielectric and a gate electrode,
a first source/drain (S/D) region and a second S/D region each of a second conductivity type, each of the S/D regions having a contact region including metal silicide and an impurity disposed therein,
a junction region with the impurity disposed therein, and a segregation region disposed between the contact region and the junction region and with the impurity disposed therein, and
wherein the impurity has a concentration that is higher in the segregation region than in the contact region and the junction region.
13. The device in accordance with claim 12 wherein impurity concentration across the contact, segregation and junction regions resembles a bell-shaped curve.
14. The device in accordance with claim 13 wherein the impurity is at least a one of nitrogen or chlorine.
15. The device in accordance with claim 13 wherein the metal silicide comprises at least a silicide of nickel or titanium.
16. The device in accordance with claim 1 wherein the impurity comprises at least one of As, B, In, Sb, Cl, S, Se, Al, Dy, Yb or Yt.
17. The device in accordance with claim 8 wherein the impurity comprises at least one of As, B, In, Sb, Cl, S, Se, Al, Dy, Yb or Yt.
18. The device in accordance with claim 12 wherein the impurity comprises at least one of As, B, In, Sb, Cl, S, Se, Al, Dy, Yb or Yt.