IP Library › Granted Patent US 9,026,977
Granted Patent B2
US 9,026,977 · App. 13/968,850 · Granted May 5, 2015

Power rail layout for dense standard cell library

Inventors: Marc Tarabbia (Pleasant Valley, NY); Norman Chen (Poughkeepsie, NY); Jian Liu (Clifton Park, NY); Nader Magdy Hindawy (Wappingers Falls, NY); Tuhin Guha Neogi (Clifton Park, NY); Mahbub Rashed (Cupertino, CA); Anurag Mittal (Wappingers Falls, NY)
Assignee: GLOBALFOUNDRIES Inc.
G06F17/5077G06F2217/06
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Quick Facts
Patent No.
US 9,026,977
App. No.
13/968,850
Granted
May 5, 2015
Kind
B2
Abstract

A method includes electrically connecting a plurality of cells of a standard cell library to a power rail. A contact area is deposited to connect a first active area and a second active area of a cell of a plurality cells. The first area and the second area are located on opposite sides of the rail and electrically connected to different drains. The contact area is electrically connected to the power rail using a via. The contact area is masked to remove a portion of the contact area to electrically separate the first active are from the second active area.

Claims (11)

1. A method, comprising:

electrically connecting a plurality of cells of a standard cell library to a power rail;

depositing a contact area to connect a first active area and a second active area of a cell of the plurality of cells, the first area and the second area located on opposite sides of the power rail and electrically connected to different drains;

electrically connecting the contact area to the power rail using a via; and

masking the contact area using a CACUT mask to remove a portion of the contact area to electrically separate the first active area from the second active area;

wherein the portion comprises a first portion removed by the masking and the contact area comprises a first contact area of a plurality of contact areas electrically connected to the power rail and further comprising masking the plurality of contact areas to form a zig zag pattern in the plurality of contact areas relative to the longitudinal dimension of the power rail.

2. The method of claim 1 further comprising masking a second contact area connecting a third active area and a fourth active area to remove a second portion of the second contact area.

3. The method of claim 2 wherein the contact area and the second contact area are offset from each other relative to a longitudinal dimension of the power rail.

4. The method of claim 3 further comprising masking a third contact area connecting a fifth active area and a sixth active area such that the contact area, the second contact area, and the third contact area form a zig zag pattern relative to the longitudinal dimension of the power rail.

5. The method of claim 4 wherein the power rail has a width of less than 128 nm.

6. The method of claim 1 wherein a tip of the contact area is perpendicular relative to a remainder of the contact area.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 16, 2013
From: TARABBIA, MARC; CHEN, NORMAN; LIU, JIAN; HINDAWY, NADER MAGDY; NEOGI, TUHIN GUHA; RASHED, MAHBUB; MITTAL, ANURAG
To: GLOBALFOUNDRIES INC.
Reel/Frame 031027/0318 →
Continuity (1)
Related Publication 20150052494A1 · Feb 19, 2015