Passive devices fabricated on glass substrates, methods of manufacture and design structures
Passive devices fabricated on glass substrates, methods of manufacture and design structures are provided. The method includes forming an opaque or semi-opaque layer on at least a first side of a glass substrate. The method further includes forming one or more passive devices on the opaque or semi-opaque layer on a second side of the glass substrate.
1. A method comprising:
forming an opaque or semi-opaque layer on and directly contacting an entire a first side of a glass substrate; and
forming one or more passive devices over the opaque or semi-opaque layer on a second side of the glass substrate; and
entirely removing the opaque or semi-opaque layer from the first side of the glass substrate, prior to packaging,
wherein the one or more passive devices are formed by etching and deposition of material processes through the first side of the glass substrate, and further comprising:
forming a first crackstop in the second side of the glass substrate and on a first lateral side of the one or more passive devices; and
forming a second crackstop in the second side of the glass substrate and on a second lateral side of the one or more passive devices, wherein
the first crackstop is formed by:
forming a trench in the second side of the glass substrate; and
filling the trench with a polysilicon or metal;
the second crackstop is formed by:
forming a trench in the second side of the glass substrate; and
filling the trench until it is pinched thereby forming a void within the glass substrate,
the first crackstop and the second crackstop are different.
2. A method comprising:
forming an opaque or semi-opaque layer on and directly contacting an entire a first side of a glass substrate;
forming one or more passive devices over the opaque or semi-opaque layer on a second side of the glass substrate, wherein the one or more passive devices are formed by etching and deposition of material processes through the first side of the glass substrate;
forming a first crackstop in the second side of the glass substrate and on a first lateral side of the one or more passive devices;
forming a second crackstop in the second side of the glass substrate and on a second lateral side of the one or more passive devices, wherein the first crackstop and the second crackstop are different;
entirely removing the opaque or semi-opaque layer from the first side of the glass substrate, prior to packaging; and
roughening of the first side of the glass substrate and conformally filling the roughening with the opaque or semi-opaque layer.
3. The method of claim 2 , wherein the opaque or semi-opaque layer is a doped polysilicon to provide a conductor for electrostatic chucking and a metal formed directly on the glass substrate.
4. A method comprising:
forming an opaque layer on a backside of a glass substrate;
forming one or more passive devices directly through the frontside of the glass substrate;
entirely removing the opaque layer on the backside of the glass substrate prior to packaging,
forming a first crackstop in the frontside of the glass substrate and on a first lateral side of the one or more passive devices;
forming a second crackstop in the frontside of the glass substrate and on a second lateral side one or more passive devices;
forming another passive device on the first side of the glass substrate, adjacent to the first crackstop;
roughening of the backside of the glass substrate and conformally filling the roughening with the opaque layer wherein:
the first crackstop is formed by:
forming a trench in the frontside of the glass substrate; and
filling the trench with a polysilicon or metal;
the second crackstop is formed by:
forming a trench in the frontside of the glass substrate; and
filling the trench until it is pinched thereby forming a void within the glass substrate, and
the opaque layer is formed directly on the glass substrate.