Scanning injector assembly module for processing substrate
An injection module assembly (IMA) that moves along a predetermined path to inject gas onto a substrate and discharge excess gas is described. The IMA may be used for processing a substrate that is difficult to move for various reasons such as a large size and weight of the substrate. The IMA is connected to one or more sets of jointed arms with structures to provide one or more paths for injecting the gas or discharging the excess gas. The IMA is moved by a first driving mechanism (e.g., linear motor) and the jointed arms are separately operated by a second driving mechanism (e.g., pulleys and cables) to reduce force or torque caused by the weight of the jointed arms. The movement of the first driving mechanism and the second driving mechanism is synchronized to move the IMA and the jointed arms.
1. A processing apparatus comprising:
an injection module assembly configured to move at a speed relative to a substrate and parallel to a surface of the substrate by a first driving mechanism while the substrate remains stationary to inject gas onto different portions of the substrate, the gas injected onto the different portions of the substrate at a surface of the injection module assembly facing the substrate;
a set of arms comprising at least a first arm and a second arm having an end rotatably connected to an end of the first arm by a hinge, another end of the first arm rotatably connected to the injection module and another end of the second arm rotatably connected to a stationary port, a path formed in the set of arms to inject the gas into the injection module assembly; and
a second mechanism configured to rotate the set of arms that causes a linear motion at the other end of the first arm at the speed of the injection module assembly.
2. The apparatus of claim 1 , further comprising another set of arms between the injection module assembly and another stationary port, the other set of arms formed with a path for discharging excess gas from the injection module assembly.
3. The apparatus of claim 2 , wherein the injection module assembly is formed with channels for routing the excess gas from the surface of the injection module to the path in the other set of arms.
4. The apparatus of claim 1 , wherein the first mechanism comprises a linear motor in the injection module assembly and a shaft on which the linear motor moves, and wherein the second mechanism comprises a motor, pulleys in the set of arms, and cables extending between the pulleys.
5. The apparatus of claim 1 , further comprising a ferrofluid seal configured to seal a gap between the hinge and the set of arms.
6. The apparatus of claim 1 , wherein the gas is source precursor or reactant precursor for performing atomic layer deposition (ALD) on the substrate.
7. The apparatus of claim 1 , wherein the injection module assembly is formed with channels to route the gas injected into the injection module assembly to chambers configured to receive the gas and expose the substrate to the gas.
8. The apparatus of claim 1 , wherein the surface of the injection module assembly comprises a constriction zone configured to facilitate removal of physisorbed molecules of the gas on the substrate by passing the gas through the constriction zone, the constriction zone formed on the surface of the injection module assembly between a chamber for receiving the gas and an exhaust cavity for discharging the excess gas.
9. The apparatus of claim 8 , wherein a height of the constriction zone is smaller than ⅓ of a height of the chamber.
10. The apparatus of claim 8 , wherein a height of the constriction zone is smaller than ⅓ of a width of the chamber.
11. The apparatus of claim 1 , wherein the injection module assembly moves horizontally.
12. The apparatus of claim 1 , wherein the set of arms are attached to a side of the injection module assembly opposite to the surface of the injection module assembly facing the substrate.