Semiconductor package and method of fabricating the same
A semiconductor package and a method of fabricating the same. The method may include mounting a lower stack including a plurality of lower semiconductor chips on a substrate and mounting an upper stack including a plurality of upper semiconductor chips on the lower stack. According to example embodiments of the inventive concept, the semiconductor package can be easily fabricated.
1. A method of fabricating a semiconductor package, comprising:
stacking a plurality of lower semiconductor chips to form a lower stack;
mounting the lower stack on a substrate;
forming a lower mold layer on the substrate to enclose a side surface of the lower stack and to expose a top surface of the lower stack;
mounting an upper stack including a plurality of upper semiconductor chips on the lower stack having the side surface enclosed by the lower mold layer; wherein the mounting of the lower stack comprises providing lower solder balls on a bottom surface of the lower stack and performing a reflow process to a structure with the lower solder balls to form lower connecting portions that are disposed between the substrate and the lower stack and are electrically connected to the substrate; and wherein the forming of the lower stack comprises preparing a first semiconductor substrate, on which a first semiconductor chip formed with first through vias is provided; mounting a second semiconductor chip with second through vias, on the first semiconductor chip of the first semiconductor substrate; and performing a separation process to the first semiconductor substrate to form the lower stack including the first and second semiconductor chips that are sequentially stacked.
2. The method of claim 1 , wherein the mounting of the upper stack comprises:
providing upper solder balls on a bottom surface of the upper stack; and
performing a reflow process to a structure with the upper solder balls to form upper connecting portions between the upper stack and the lower stack.
3. The method of claim 1 , wherein the lower mold layer is formed to fill gap regions between the substrate and the lower stack and between the lower semiconductor chips.
4. The method of claim 1 , further comprising forming an upper mold layer to cover the lower mold layer, the lower stack, and the upper stack.
5. The method of claim 4 , wherein the upper mold layer is formed to fill gap regions between the lower and upper stack and between the upper semiconductor chips.
6. The method of claim 4 , wherein the upper mold layer comprises a different material from the lower mold layer.
7. The method of claim 1 , wherein the lower mold layer is formed in such a way that an uppermost surface thereof is coplanar with or lower than a top surface of the lower stack.
8. The method of claim 1 , wherein the upper stack comprises third and fourth semiconductor chips that are sequentially stacked, and the third semiconductor chip comprises third through vias penetrating the third semiconductor chip.
9. A method of fabricating a semiconductor package, comprising:
forming a first mold layer between a substrate and a first stack of semiconductor chips mounted thereon and along sides of the first stack such that a top surface of the first stack is exposed to mount a second stack of semiconductor chips thereon;
forming a second mold layer underneath and along sides of the mounted second stack such that a top surface of the second stack is exposed to mount another semiconductor chip stack,
wherein mounting of the first stack on the substrate comprises:
providing lower solder balls on a bottom surface of the first stack; and
performing a reflow process to the lower solder balls to form lower connecting portions that are disposed between the substrate and the first stack and are electrically connected to the substrate; and wherein the forming of the first stack comprises preparing a first semiconductor substrate, on which a first semiconductor chip formed with first through vias is provided; mounting a second semiconductor chip with second through vias, on the first semiconductor chip of the first semiconductor substrate; and performing a separation process to the first semiconductor substrate to form the lower stack including the first and second semiconductor chips that are sequentially stacked.
10. The method of claim 9 , wherein mounting of the second stack comprises:
providing upper solder balls on a bottom of the second stack; and
performing a reflow process on the upper solder balls to form upper connecting portions between the second stack and the first stack.
11. The method of claim 9 , wherein second mold layer covers the first mold layer, the first stack, and the second stack.
12. The method of claim 9 , wherein the first mold layer comprise a different material from the second mold layer.
13. A method of fabricating a semiconductor package, comprising:
forming a first mold layer between a substrate and a first stack of semiconductor chips mounted thereon and along sides of the first stack such that a top surface of the first stack is exposed to mount a second stack of semiconductor chips;
forming a second mold layer underneath and along sides of the mounted second stack such that a top surface of the second stack is exposed to mount another semiconductor chip stack,
wherein mounting of the second stack comprises:
providing upper solder balls on a bottom of the second stack; and
performing a reflow process on the upper solder balls to form upper connecting portions between the second stack and the first stack; and wherein the forming of the first stack comprises preparing a first semiconductor substrate, on which a first semiconductor chip formed with first through vias is provided; mounting a second semiconductor chip with second through vias, on the first semiconductor chip of the first semiconductor substrate; and performing a separation process to the first semiconductor substrate to form the lower stack including the first and second semiconductor chips that are sequentially stacked.