IP Library Granted Patent US 9,368,710
Granted Patent B2
US 9,368,710 · App. 14/022,407 · Granted Jun 14, 2016

Transparent flexible nanogenerator as self-powered sensor for transportation monitoring

Inventors: Zhong Lin Wang (Atlanta, GA); Youfan Hu (Atlanta, GA); Long Lin (Atlanta, GA)
Assignee: Georgia Tech Research Corporation
H01L41/0805B82Y15/00B82Y30/00G01G19/08G01P3/02G08G1/0104H01L27/20H01L41/082H01L41/1136H01L41/183H01L41/319H02N2/18H02N2/181H02N2/186B82Y40/00Y10S977/948
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Quick Facts
Patent No.
US 9,368,710
App. No.
14/022,407
Granted
Jun 14, 2016
Kind
B2
Abstract

A traffic sensor includes a flexible substrate having a top surface. A piezoelectric structure extends from the first electrode layer. The piezoelectric structure has a top end. An insulating layer is infused into the piezoelectric structure. A first electrode layer is disposed on top of the insulating layer. A second electrode layer is disposed below the flexible substrate. A packaging layer is disposed around the substrate, the first electrode layer, the piezoelectric structure, the insulating layer and the second electrode layer. In a method of sensing a traffic parameter, a piezoelectric nanostructure-based traffic sensor is applied to a roadway. An electrical event generated by the piezoelectric nanostructure-based traffic sensor in response to a vehicle interacting with the piezoelectric nanostructure-based traffic sensor is detected. The electrical event is correlated with the traffic parameter.

Claims (31)

1. A traffic sensor, comprising:

(a) a flexible substrate having a top surface;

(b) a piezoelectric structure, that includes a dense plurality of vertically-aligned piezoelectric elongated nanostructures, extending from the first electrode layer, the piezoelectric structure having a top end;

(c) an insulating layer infused into a portion of the piezoelectric structure at the top end of the piezoelectric structure;

(d) a first electrode layer disposed below the flexible substrate;

(e) a second electrode layer disposed on top of the insulating layer so that the insulating layer electrically isolates the second electrode layer from the top end of the piezoelectric structure; and

(f) a packaging layer disposed around the substrate, the first electrode layer, the piezoelectric structure, the insulating layer and the second electrode layer.

2. The traffic sensor of claim 1 , wherein the substrate layer comprises PDMS.

3. The traffic sensor of claim 1 , wherein the piezoelectric structure comprises a piezoelectric film.

4. The traffic sensor of claim 1 , wherein the nanostructures comprise densely packed zinc oxide nanowires.

5. The traffic sensor of claim 1 , wherein the insulating layer comprises a material selected from a group consisting of: PMMA, Al 2 O 3 , HfO 2 , an insulating polymer and combinations thereof.

6. The traffic sensor of claim 1 , wherein the first electrode layer comprises indium tin oxide.

7. The traffic sensor of claim 1 , wherein the first electrode layer comprises a metal.

8. The traffic sensor of claim 1 , wherein the second electrode layer comprises indium tin oxide.

9. The traffic sensor of claim 1 , wherein the second electrode layer comprises a metal.

10. The traffic sensor of claim 1 , wherein the packaging layer comprises PMMA.

11. A method of sensing a traffic parameter, comprising the steps of:

(a) applying a piezoelectric nanostructure-based traffic sensor to a roadway, wherein the traffic sensor comprises:

(i) a PDMS flexible substrate having a top surface;

(ii) a piezoelectric structure, that includes a dense plurality of vertically-aligned piezoelectric elongated nanostructures, extending from the first electrode layer, the piezoelectric structure having a top end;

(iii) an insulating layer infused into a portion of the piezoelectric structure at the top end of the piezoelectric structure;

(iv) a first electrode layer disposed below the flexible substrate;

(v) a second electrode layer disposed on top of the insulating layer so that the insulating layer electrically isolates the second electrode layer from the top end of the piezoelectric structure; and

(vi) a packaging layer disposed around the substrate, the first electrode layer, the piezoelectric structure, the insulating layer and the second electrode layer;

(b) detecting an electrical event generated by the piezoelectric nanostructure-based traffic sensor in response to a vehicle interacting with the piezoelectric nanostructure-based traffic sensor; and

(c) correlating the electrical event with the traffic parameter.

12. The method of claim 11 , wherein the traffic parameter comprises speed of the vehicle and wherein the electrical event comprises an amount of time between two different voltage maxima generated by the traffic sensor.

13. The method of claim 11 , wherein the traffic parameter comprises weight of the vehicle and wherein the electrical event comprises a voltage level generated by the traffic sensor.

14. The method of claim 11 , wherein the nanostructures comprise densely packed zinc oxide nanowires.

15. The method of claim 11 , wherein the insulating layer comprises a material selected from a group consisting of: PMMA, Al 2 O 3 , HfO 2 , an insulating polymer and combinations thereof.

16. The method of claim 11 , wherein the first electrode layer and the second electrode layer each comprise a material selected from a group consisting of: indium tin oxide and a metal.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 6, 2018
From: GEORGIA INSTITUTE OF TECHNOLOGY
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 045853/0915 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 9, 2014
From: WANG, ZHONG L.; HU, YOUFAN; LIN, LONG
To: GEORGIA TECH RESEARCH CORPORATION
Reel/Frame 031927/0908 →
Continuity (5)
Continuation In Part 13473867 · May 17, 2012
Provisional Application 61698854 · Sep 10, 2012
Provisional Application 61486927 · May 17, 2011
Provisional Application 61596405 · Feb 8, 2012
Related Publication 20140007687A1 · Jan 9, 2014