Direct/laminate hybrid encapsulation and method of hybrid encapsulation
An encapsulated device achieves good water vapor transmission rates while reducing the amount of time needed in an inert environment, and thereby reducing the size of the deposition tool used to encapsulate the device. The encapsulated device includes a first barrier layer deposited directly on the device, and a first adhesive and first laminate on the first barrier layer. The laminate comprises a polymeric substrate and a second barrier layer on the substrate. The first barrier layer has a water vapor transmission rate suitable to allow lamination of the laminate on the first barrier layer in a non-inert environment. A method of making an encapsulated device comprises depositing a first barrier layer on the device in an inert environment, applying an adhesive on the first barrier layer in a non-inert environment, and applying a first laminate on the first adhesive in the non-inert environment.
1. A method of making an encapsulated device, the method comprising:
depositing a first barrier layer on the device in an inert environment, the first barrier layer comprising a first barrier material;
forming a first laminate comprising forming a second barrier layer on a polymeric substrate, the second barrier layer comprising a second barrier material;
applying an adhesive on the first barrier layer in a non-inert environment; and
applying the laminate on the adhesive in the non-inert environment.
2. The method of claim 1 , wherein the first and second barrier materials are each independently selected from the group consisting of metals, metal oxides, metal nitrides, metal oxynitrides, metal carbides, metal oxyborides, Al, Zr, Zn, Sn, Ti, and combinations thereof.
3. The method of claim 1 , wherein the first laminate further comprises a decoupling layer between the polymeric substrate and the second barrier layer, the decoupling layer and the second barrier layer forming a dyad.
4. The method of claim 3 , wherein the first laminate comprises a single dyad.
5. The method of claim 3 , wherein the first laminate comprises two or more dyads.
6. The method of claim 1 , wherein the first adhesive comprises a liquid adhesive.
7. The method of claim 1 , further comprising:
forming one or more second laminates, wherein the forming each of the second laminates comprises forming a third barrier layer on a polymeric substrate, the third barrier layer comprising a third barrier material;
applying a second adhesive on the first laminate in the non-inert environment; and
applying one of the one or more second laminates on the second adhesive in the non-inert environment.
8. The method of claim 7 , further comprising applying the second adhesive between each of the one or more second laminates in the non-inert environment.
9. The method of claim 7 , wherein the one or more second laminates comprises two or more laminates.
10. The method of claim 7 , wherein the third barrier material is selected from the group consisting of metals, metal oxides, metal nitrides, metal oxynitrides, metal carbides, metal oxyborides, Al, Zr, Zn, Sn, Ti, and combinations thereof.
11. The method of claim 7 , wherein the second adhesive comprises a liquid adhesive.