Staircase-shaped connection structures of three-dimensional semiconductor devices
Provided is a staircase-shaped connection structure of a three-dimensional semiconductor device. The device includes an electrode structure on a substrate, the electrode structure including an upper staircase region, a lower staircase region, and a buffer region therebetween. The electrode structure includes horizontal electrodes sequentially stacked on the substrate, the horizontal electrodes include a plurality of pad regions constituting a staircase structure of each of the upper and lower staircase regions, and the buffer region has a width that is larger than that of each of the pad regions.
1. A three-dimensional semiconductor device, comprising:
an electrode structure on a substrate, the electrode structure including an upper staircase region, a lower staircase region, and a buffer region therebetween,
wherein the electrode structure comprises horizontal electrodes sequentially stacked on the substrate,
the horizontal electrodes comprise a plurality of pad regions constituting a staircase structure of each of the upper and lower staircase regions, and
the buffer region has a width that is larger than that of each of the pad regions.
2. The device of claim 1 , wherein the buffer region has a thickness that is smaller than or equal to a minimum thickness of the upper staircase region and is greater than or equal to a maximum thickness of the lower staircase region.
3. The device of claim 1 , further comprising an insulating layer on the electrode structure, wherein the insulating layer has a flat top surface and covers an entire top surface of the buffer region.
4. The device of claim 3 , wherein the insulating layer has a substantially monotonically increasing thickness in a direction from the upper staircase region to the lower staircase region.
5. The device of claim 3 , wherein the buffer region is in direct contact with the insulating layer.
6. The device of claim 1 , wherein the electrode structure further comprises a cell array region,
the upper staircase region is located between the cell array region and the lower staircase region, and
the upper and lower staircase regions have a stepwise-decreasing thickness in a direction away from the cell array region.
7. The device of claim 6 , wherein each of the upper and lower staircase regions has at least two different thicknesses, which are changed in an alternating manner, when measured at a same distance from the cell array region.
8. The device of claim 1 , wherein, when viewed in a plan view, an uppermost one of the horizontal electrodes constituting the buffer region comprises:
a connecting portion continuously extending from the upper staircase region to the lower staircase region; and
a protruding portion horizontally protruding from the connecting portion, the protruding portion being spaced apart from at least one of the upper and lower staircase regions.
9. The device of claim 1 , wherein, when viewed in a plan view, an uppermost one of the horizontal electrodes constituting the buffer region extends from the upper staircase region continuously to the lower staircase region and exposes a second uppermost one of the horizontal electrodes from the upper staircase region continuously to the lower staircase region.
10. The device of claim 1 , further comprising charge-storing-type and/or variable-resistance-type memory cells that are three-dimensionally arranged on the substrate.
11. A semiconductor device, comprising:
a staircase on a substrate, the staircase comprising a plurality of steps having conductive treads and an intermediate landing between a first one of the plurality of steps and a second one of the plurality of steps, the plurality of steps all going down in a given direction that extends along a face of the substrate.
12. The device of claim 11 wherein the intermediate landing is deeper than each of the conductive treads.
13. The device of claim 12 wherein the intermediate landing includes a conductive surface.
14. The device of claim 11 further comprising a plurality of conductive vias, a respective one of which electrically contacts a respective one of the conductive treads and extends away from the respective one of the conductive treads.
15. The device of claim 11 further comprising an insulating layer on the staircase, the insulating layer including a fiat outer surface on the steps and a flat outer surface on the intermediate landing.
16. The device of claim 15 wherein the insulating layer increases in thickness going down the steps of the staircase.
17. The device of claim 11 , wherein the substrate includes an upper staircase region, a lower staircase region, and a buffer region between the upper staircase region and the lower staircase region, and
wherein a height of the staircase is greater in the upper staircase region than in the lower staircase region.
18. The device of claim 17 , wherein the staircase has a decreasing thickness in a direction from the upper staircase region to the lower staircase region.
19. The device of claim 17 , wherein the staircase has a substantially uniform thickness in the buffer region.
20. A semiconductor device, comprising:
a staircase on a substrate, the staircase comprising a plurality of steps having conductive treads and an intermediate landing,
wherein at least one of the conductive treads includes multiple levels.