Device for holding multiple semiconductor devices during thermocompression bonding and method of bonding
Disclosed is a device for holding a plurality of semiconductor devices during thermocompression bonding, comprising: a body; a plurality of support surfaces at a first side of the body, each support surface being configured for holding at least one semiconductor device during thermocompression bonding; and a plurality of internal conduits within the body, each internal conduit extending from an opening of a respective one of the support surfaces at the first side of the body to an opening at a second side of the body. In particular, the openings at the second side of the body are configured to be connected to separate pneumatic paths to be in fluid communication therewith, each pneumatic path having an independently controlled pneumatic suction force so that the openings of the support surfaces at the first side of the body are operative to selectively hold the one or more semiconductor devices against the support surfaces at the first side of the body or to release the same therefrom. An apparatus for holding semiconductor devices during thermocompression bonding, and a method of bonding a plurality of semiconductor devices to a substrate via thermocompression bonding are also disclosed.
1. A device for holding a plurality of semiconductor devices during thermocompression bonding, the device comprising:
a body;
a plurality of support surfaces at a first side of the body, each support surface being configured to hold at least one semiconductor device during thermocompression bonding; and
a plurality of internal conduits within the body, each internal conduit extending from an opening of a respective one of the support surfaces at the first side of the body to an opening at a second side of the body,
wherein each of the openings at the second side of the body is configured to be connected to a respective first pneumatic path to be in fluid communication therewith, each first pneumatic path having an independently controlled pneumatic suction force so that the openings of the support surfaces at the first side of the body are operative to selectively hold the one or more semiconductor devices against the support surfaces at the first side of the body or to release the same therefrom; and
a closed collet passage arranged along a surface of the second side of the body which is operative to be in fluid communication with a further pneumatic path for forming an enclosed vacuum path on the body for holding the device against a heater.
2. The device of claim 1 , wherein the second side of the body further comprises a plurality of first pneumatic passages which are operative to be in fluid communication with respective ones of the first pneumatic paths.
3. The device of claim 2 , wherein each of the openings at the second side of the body is arranged at an end of a respective one of the first pneumatic passages.
4. The device of claim 2 , wherein each of the first pneumatic passages includes a kink.
5. The device of claim 1 , wherein the second side of the body comprises the collet passage which is operative to be in fluid communication with the further pneumatic path having an independently controlled pneumatic suction force.
6. The device of claim 5 , wherein the collet passage is arranged along a periphery of the second side of the body.
7. The device of claim 1 , wherein the support surfaces at the first side of the body are arranged at different heights for holding different semiconductor devices.
8. The device of claim 1 , wherein the support surfaces at the first side of the body comprise different surface areas for holding different semiconductor devices.
9. An apparatus for holding semiconductor devices during thermocompression bonding, the apparatus comprising:
a heater;
wherein the device of claim 1 is coupled to the heater;
wherein the heater is operative to heat the device of claim 1 to thereby heat the semiconductor devices that are being held.
10. The apparatus of claim 9 , wherein the heater comprises a plurality of through holes which are operative to be in fluid communication with respective ones of the internal conduits within the body of the device for holding a plurality of the semiconductor devices.
11. The apparatus of claim 10 , wherein the second side of the body of the device for holding a plurality of the semiconductor devices further comprises a plurality of first pneumatic passages which are operative to be in fluid communication with respective ones of the first pneumatic paths, and each of the through holes of the heater and the corresponding opening at the second side of the body of the device for holding a plurality of the semiconductor devices are arranged at opposite ends of a respective one of the first pneumatic passages on the second side of the body of the device for holding a plurality of the semiconductor devices.
12. The apparatus of claim 11 , wherein the heater further comprise another through hole which is operative to be in fluid communication with the further pneumatic path having an independently controlled pneumatic suction force to hold the body of the device for holding a plurality of the semiconductor devices, such that the device for holding a plurality of the semiconductor devices is operative to be detachably coupled to the heater.