Backlight image sensor chip having improved chip driving performance
The present invention relates to a backlight image sensor chip having improved chip driving performance, in which a region other than a pad region, on which a conductive pad is formed, and a sensing region, on which an optical filter is formed, is used as a region for auxiliary driving so that additional functions such as auxiliary power supply, auxiliary signal transmission and auxiliary operation control can be performed, without additional process, in the backlight image sensor chip having a restricted area, thereby improving the chip driving performance.
1. A backlight image sensor having improved chip driving performance, which includes an element stacked unit having a semiconductor substrate, a semiconductor circuit module formed on a front side of the semiconductor substrate, an image sensor module and an interlayer insulation layer, an insulation multi-layer formed on a back side of the semiconductor substrate, a conductive pad formed on a portion of the back side of the insulation multi-layer, and a coupling unit electrically coupled between the conductive pad and the semiconductor circuit module of the element stacked unit, comprising:
at least one routing metal formed in a region of a same layer as the conductive pad, and being electrically coupled to and directly contacting the conductive pad;
at least one auxiliary driving unit formed in the element stacked unit or the insulation multi-layer; and
an auxiliary coupling unit being electrically coupled between the at least one routing metal and the at least one auxiliary driving unit.
2. The backlight image sensor having improved chip driving performance of claim 1 , wherein the at least one auxiliary driving unit is at least one auxiliary power line for an auxiliary power supply.
3. The backlight image sensor having improved chip driving performance of claim 1 , wherein the at least one auxiliary driving unit is at least one auxiliary signal transmission line for auxiliary signal transmission.
4. The backlight image sensor having improved chip driving performance of claim 1 , wherein the at least one auxiliary driving unit is an active element or a passive element for an auxiliary operation control.
5. The backlight image sensor having improved chip driving performance of claim 1 , wherein the at least one routing metal is composed of a multi-layer structure, each of the routing metal is electrically coupled to each other through via, and at least one routing metal is electrically coupled to the at least one auxiliary driving unit through the auxiliary coupling unit.
6. The backlight image sensor having improved chip driving performance of claim 1 , wherein the insulation multi-layer comprises:
an anti-reflection layer that is deposited on the back side of the semiconductor substrate;
a preferential metal deposition (PDM) dielectric layer; and
an insulation layer stacked on a back side of the PDM dielectric layer.
7. The backlight image sensor having improved chip driving performance of claim 1 , further comprising:
a dielectric layer stacked on a back side of the insulation multi-layer and configured to protect and support the conductive pad and the routing metal.
8. The backlight image sensor having improved chip driving performance of claim 1 , further comprising:
a micro-lens configured to concentrate a light; and
an optical filter configured to pass a specific frequency band of the light concentrated by the micro-lens.
9. The backlight image sensor having improved chip driving performance of claim 8 , further comprising:
a handling substrate formed on a front side of the element stacked unit.
10. The backlight image sensor having improved chip driving performance of claim 1 , wherein the auxiliary coupling unit is directly connected to the at least one routing metal and the at least one auxiliary driving unit.
11. The backlight image sensor having improved chip driving performance of claim 1 , wherein the at least one auxiliary driving unit is disposed between the semiconductor circuit module and the image sensor module.
12. The backlight image sensor having improved chip driving performance of claim 1 , further comprising:
a metal shield between the at least one routing metal and an optical filter.