Method for fabricating semiconductor device having fin structure that includes dummy fins

1. A method for fabricating semiconductor device, comprising:

providing a substrate;

forming a sacrificial mandrel on the substrate, wherein the sacrificial mandrel comprises an indentation; and

forming a spacer adjacent to the sacrificial mandrel.

2. The method of claim 1 , wherein the sacrificial mandrel comprises a first side and a second side with the indentation, the method further comprises;

forming the spacer adjacent to the first side and the second side;

removing the sacrificial mandrel; and

using the spacer to remove part of the substrate for forming a fin-shaped structure and a dummy fin-shaped structure.

3. The method of claim 2 , wherein the dummy fin-shaped structure comprises a curve.

4. The method of claim 3 , wherein the curve is omega shaped.

5. The method of claim 2 further comprising:

performing a fin-cut process;

forming a gate structure on the fin-shaped structure;

forming a first epitaxial layer on the fin-shaped structure adjacent to two sides of the gate structure and a second epitaxial layer on the dummy fin-shaped structure; and

forming a contact plug on the first epitaxial layer and the second epitaxial layer.

6. The method of claim 5 , further comprising:

forming a silicide on the first epitaxial layer and the second epitaxial layer; and

forming the contact plug on the silicide.