Low temperature co-fired ceramic substrate with embeded capacitors
The present invention relates to a low temperature co-fired ceramic substrate with embedded capacitors. According to an embodiment of the present invention, the low temperature co-fired ceramic substrate with embedded capacitors is able to prevent diffusion, peeling or loss of electrodes after low temperature firing by controlling composition ratio of various metals included in the substrate, resulting in good adhesion between the ceramic substrate and the capacitor.
1. A low temperature co-fired ceramic substrate with an embedded capacitor in which a first electrode is laminated on a plurality of printed ceramic green sheets and a cavity is formed in the substrate, the substrate comprising:
a multi-layer ceramic capacitor arranged inside the cavity and comprising a second electrode which is electrically connected to the first electrode,
wherein the first electrode includes 95-100 wt % of Ag, and
wherein the second electrode includes 65-90 wt % of Ag and a metal having a higher melting point than that of Ag.
2. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the first electrode further comprises at least one selected from the group consisting of Au, Cu, Pd, W and an alloy thereof.
3. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the first electrode comprises a via electrode passing through at least one of the plurality of printed ceramic green sheets and a connecting electrode electrically connected to the second electrode.
4. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 3 , wherein the first electrode further comprises a pad electrode between the via electrode and the connecting electrode.
5. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the second electrode comprises at least one metal selected from the group consisting of Au, Cu, Pd, W and an alloy thereof.
6. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 5 , wherein the second electrode includes 70-90 wt % of Ag.
7. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the first electrode further includes 0.5-5 wt % of CaO—BaO—SiO 2 —B 2 O 3 -based glass.
8. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 7 , wherein the glass transition temperature of the glass is 600-850° C.
9. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 8 , wherein compositional formula of the glass is 20CaO-25BaO-50SiO 2 -5B 2 O 3 or 20CaO-20BaO-55SiO 2 -5B 2 O 3 .
10. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein firing temperature of the low temperature co-fired ceramic substrate with embedded capacitors is 800-950° C.
11. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the first electrode comprises a via electrode passing through at least one of the plurality of printed ceramic green sheets, and a pad electrode and connecting electrode disposed in the cavity.
12. The low temperature co-fired ceramic substrate with an embedded capacitor of claim 1 , wherein the multi-layer ceramic capacitor is arranged to be spaced-apart from the plurality of printed ceramic green sheets.