Semiconductor device having shallow trench isolation structure
A semiconductor device is provided, which prevents a case where the widths of word lines become uneven because of a stress developing at the border between a memory cell area and a peripheral circuit area. The semiconductor device 1 has a semiconductor substrate 2 on which a memory cell area MC defined by a peripheral isolation region 3 c . The memory cell area MC has multiple cell active regions k defined by multiple cell isolation regions 3 a, 3 b . Guard active regions GLa, GLb made of the semiconductor substrate are disposed in the border between the memory cell area MC and the peripheral isolation region 3 c to separate the memory cell isolation regions 3 a, 3 b from the peripheral isolation region 3 c.
1. An apparatus comprising:
an active cell area including a plurality of first active regions isolated from each other, a plurality of word lines extending in a first direction substantially parallel to each other and a plurality of bit lines extending in a second direction substantially parallel to each other, the second direction crossing the first direction;
a dummy cell area provided outside the active cell area, the dummy cell area including a plurality of second active regions arranged in a column along the first direction and isolated from each other;
an isolation area provided outside the dummy cell area; and
a guard active region intervening between the isolation area and the dummy cell area, the guard active region comprising a first guard active region extending longitudinally along the first direction, the first guard active region having a comb shape comprising a continuous straight-linear active region comb shaft extending along the first direction and spaced active region comb teeth angling from the comb shaft away from the isolation area, the spaced active region comb teeth individually alternating with individual of the dummy second active regions in the column along the first direction, the individual comb teeth along the first direction being between every immediately-adjacent of the individual dummy second active regions with no additional active region being between immediately-adjacent of the individual comb teeth.
2. The apparatus of claim 1 wherein the guard active region further comprises a second guard active region extending along the second direction.
3. The apparatus of claim 2 wherein the first active regions are arranged in columns along the first direction, the second guard active region extending longitudinally continuously along the second direction along multiple of the columns of the first active regions.
4. The apparatus of claim 2 wherein the first active regions are arranged in columns along the first direction, the second guard active region extending longitudinally discontinuously along the second direction.
5. The apparatus of claim 1 wherein the spaced active region comb teeth angle from the comb shaft non-perpendicularly.
6. The apparatus of claim 1 wherein the first active regions are arranged in columns along the first direction, the guard active region further comprises a second guard active region extending along the second direction, the second guard active region extending longitudinally discontinuously along the second direction and comprises spaced second guard active regions that are individually aligned with one of first active region columns.
7. The apparatus of claim 6 wherein the spaced second guard active regions are individually of trapezoidal shape in horizontal cross section.
8. An apparatus comprising:
an active cell area including a plurality of first active regions isolated from each other, a plurality of word lines extending in a first direction substantially parallel to each other and a plurality of bit lines extending in a second direction substantially parallel to each other, the second direction crossing the first direction;
a dummy cell area provided outside the active cell area, the dummy cell area including a plurality of second active regions arranged in a column along the first direction and isolated from each other;
an isolation area provided outside the dummy cell area;
a guard active region intervening between the isolation area and the dummy cell area, the guard active region comprising a first guard active region extending longitudinally along the first direction, the first guard active region having a comb shape comprising a continuous straight-linear active region comb shaft extending along the first direction and spaced active region comb teeth angling from the comb shaft away from the isolation area;
the guard active region further comprises a second guard active region extending along the second direction
the first active regions are arranged in columns along the first direction, the second guard active region extending longitudinally discontinuously along the second direction along multiple of the columns of the first active regions; and
the discontinuously-extending second guard active region comprises spaced second guard active regions that are individually aligned with one of first active region columns.
9. The apparatus of claim 8 wherein the spaced second guard active regions are individually of trapezoidal shape in horizontal cross section.
10. An apparatus comprising:
an active cell area including a plurality of first active regions isolated from each other, a plurality of word lines extending in a first direction substantially parallel to each other and a plurality of bit lines extending in a second direction substantially parallel to each other, the second direction crossing the first direction;
a dummy cell area provided outside the active cell area, the dummy cell area including a plurality of second active regions arranged in a column along the first direction and isolated from each other;
an isolation area provided outside the dummy cell area;
a guard active region intervening between the isolation area and the dummy cell area, the guard active region comprising a first guard active region extending longitudinally along the first direction, the first guard active region having a comb shape comprising a continuous straight-linear active region comb shaft extending along the first direction and spaced active region comb teeth angling from the comb shaft away from the isolation area;
the guard active region further comprises a second guard active region extending along the second direction
the first active regions are arranged in columns along the first direction, the second guard active region extending longitudinally discontinuously along the second direction along multiple of the columns of the first active regions; and
the discontinuously-extending second guard active region comprises spaced second guard active regions that are individually of trapezoidal shape in horizontal cross section.
11. An apparatus comprising:
an active cell area including a plurality of first active regions isolated from each other, a plurality of word lines extending in a first direction substantially parallel to each other and a plurality of bit lines extending in a second direction substantially parallel to each other, the second direction crossing the first direction;
a dummy cell area provided outside the active cell area, the dummy cell area including a plurality of second active regions arranged in a column along the first direction and isolated from each other;
an isolation area provided outside the dummy cell area;
a guard active region intervening between the isolation area and the dummy cell area, the guard active region comprising a first guard active region extending longitudinally continuously along the first direction and a second guard active region extending longitudinally discontinuously along the second direction, the discontinuously-extending second guard active region comprising spaced second guard active regions; and
the spaced second guard active regions are individually of trapezoidal shape in horizontal cross section.
12. An apparatus comprising:
an active cell area including a plurality of first active regions isolated from each other, a plurality of word lines extending in a first direction substantially parallel to each other and a plurality of bit lines extending in a second direction substantially parallel to each other, the second direction crossing the first direction;
a dummy cell area provided outside the active cell area, the dummy cell area including a plurality of second active regions arranged in a column along the first direction and isolated from each other;
an isolation area provided outside the dummy cell area;
a guard active region intervening between the isolation area and the dummy cell area, the guard active region comprising a first guard active region extending longitudinally continuously along the first direction and a second guard active region extending longitudinally discontinuously along the second direction, the discontinuously-extending second guard active region comprising spaced second guard active regions; and
the first active regions are arranged in columns along the first direction, the spaced second guard active regions being individually aligned with one of first active region columns.
13. The apparatus of claim 12 wherein the spaced second guard active regions are individually of trapezoidal shape in horizontal cross section.