IP Library › Granted Patent US 9,837,377
Granted Patent B2
US 9,837,377 · App. 14/519,753 · Granted Dec 5, 2017

Semiconductor device including two or more chips mounted over wiring substrate

Inventors: Sensho Usami (Akita, JP); Kazuhiko Shibata (Akita, JP); Yutaka Kagaya (Akita, JP)
Assignee: Micron Technology, Inc.
H01L25/0652G11C5/02H01L23/49838H01L24/06H01L24/97H01L25/0657H01L21/561H01L23/3128H01L23/49811H01L23/49827H01L23/49894H01L23/562H01L2224/32145H01L2224/32225H01L2224/48227H01L2224/48228H01L2224/49171H01L2224/73265H01L2224/97H01L2225/0651H01L2225/06565H01L2924/1436H01L2924/15183H01L2924/15311
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Quick Facts
Patent No.
US 9,837,377
App. No.
14/519,753
Granted
Dec 5, 2017
Kind
B2
Abstract

A semiconductor device includes a composite chip mounted over the a wiring substrate, the composite chip including a first area and a second area that is provided independently from the first area, the first area including a first circuit formed in the first area, and the second area including a second circuit formed in the second area.

Claims (34)

1. A semiconductor device comprising:

a wiring substrate;

a first single semiconductor substrate mounted over the wiring substrate, the first single semiconductor substrate comprising:

a first circuit formation area including a plurality of first circuit blocks, a plurality of first electrode pads that are disposed in a first layout, and a first sidewall;

a second circuit formation area that is provided independently from the first circuit formation area, the second circuit formation area including a plurality of second circuit blocks, a plurality of second electrode pads that are disposed in a second layout, and a second sidewall facing the first sidewall of the first circuit formation area, wherein the first layout is identical to the second layout; and

a dicing area including a first material between and mechanically connecting the first and second circuit formation areas, wherein the first and second circuit formation areas are spaced apart from each other by the first material, and wherein the first material directly contacts the first and second sidewalls; and

a mold material over the wiring substrate and first single semiconductor substrate, wherein the mold material is a second material different than the first material.

2. The semiconductor device as claimed in claim 1 , further comprising a second single semiconductor substrate mounted over the wiring substrate, the second single semiconductor substrate comprising a third circuit formation area and a fourth circuit formation area that is provided independently from the third circuit formation area, the third circuit formation area comprising a plurality of third circuit blocks and a plurality of third electrode pads that are disposed in a third layout, the fourth circuit formation area comprising a plurality of fourth circuit blocks and a plurality of fourth electrode pads that are disposed in a fourth layout, and the third layout being identical to fourth layout.

3. The semiconductor device as claimed in claim 2 , wherein the first single semiconductor substrate intervening between the wiring substrate and the second single semiconductor substrate.

4. The semiconductor device as claimed in claim 2 , wherein the first, second, third and fourth layout are identical to one another.

5. The semiconductor device as claimed in claim 3 , each of the first, second, third and fourth circuit formation areas comprises a dynamic random access memory circuit.

6. The semiconductor device as claimed in claim 1 , wherein the wiring substrate includes a plurality of connection pads thereon, wherein each of the connection pads is coupled to an associated one of either the first and second electrode pads via a wire or a bump electrode.

7. The semiconductor device as claimed in claim 1 , wherein the first and second circuit formation areas are substantially free from electrically connecting to each other.

8. The semiconductor device as claimed in claim 1 , wherein the dicing area has a width in a range of 20 μm to 80 μm.

9. The semiconductor device as claimed in claim 1 , wherein the first single semiconductor substrate includes a protective layer selectively formed over the first and second circuit formation areas so as to expose the first and second electrode pads, a first rewiring pad formed on the protective layer in the first circuit formation area, a first redistribution wiring formed on the protective layer and coupled between an associated one of the first electrode pads and the first rewiring pad, and an insulating layer formed above the protective layer and the first redistribution wiring so as to expose the first rewiring pad.

10. The semiconductor device as claimed in claim 1 , wherein the dicing area extends along an entire length of the single semiconductor substrate.

11. The semiconductor device as claimed in claim 1 , wherein:

the dicing area extends in a first direction along an entire length of the first single semiconductor substrate; and

the dicing area has a width in a second direction that is perpendicular to the first direction.

12. The semiconductor device as claimed in claim 11 , wherein the width is in the range of 20 μm to 80 μm.

13. The semiconductor device as claimed in claim 1 , further comprising a die attach film between the wiring substrate and the first single semiconductor substrate and extending over each of the dicing area, the first circuit formation area, and the second circuit formation area.

14. The semiconductor device as claimed in claim 1 , further comprising a die attach film at least between the dicing area and the wiring substrate.

15. The semiconductor device as claimed in claim 1 , wherein the first circuit formation area, the second circuit formation area and the first material are each coupled to the wiring substrate.

16. The semiconductor device as claimed in claim 1 , wherein the first material has a top surface that is coplanar with top surfaces of the first circuit formation area and the second circuit formation area.

17. The semiconductor device as claimed in claim 1 , wherein the mold material is a sealing resin.

18. A semiconductor device comprising:

a wiring substrate;

a semiconductor substrate mounted to the wiring substrate;

a first circuit semiconductor chip comprising a first portion of the semiconductor substrate, the first semiconductor chip including a plurality of first circuit blocks, a plurality of first electrode pads that are arranged in a circuit layout, and a first sidewall;

a second semiconductor chip comprising a second portion of the semiconductor substrate, the second semiconductor chip including a plurality of first circuit blocks, a plurality of first electrode pads that are arranged in the same circuit layout as the circuit layout of the first semiconductor chip, and a second sidewall facing the first sideall of the first semiconductor chip; and

a dicing area comprising a third portion of the semiconductor substrate, wherein the dicing area includes a first material that is between and mechanically connects the first and second semiconductor chips, wherein the first and second semiconductor chips are spaced apart from each other by the first material, and wherein the first material directly contacts the first and second sidewalls; and

a sealant material over the wiring substrate and semiconductor substrate, wherein the sealant material is a second material different than the first material.

19. The semiconductor device as claimed in claim 18 , wherein the dicing area extends along an entire length of the semiconductor substrate.

20. The semiconductor device as claimed in claim 18 , wherein the dicing area, the first semiconductor chip, and the second semiconductor chip are between the sealant material and the wiring substrate.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 21, 2014
From: USAMI, SENSHO; SHIBATA, KAZUHIKO; KAGAYA, YUTAKA
To: MICRON TECHNOLOGY, INC.
Reel/Frame 033994/0585 →
Priority Claims (2)
JP 2013-218905 · Oct 22, 2013 · national
JP 2014-111402 · May 29, 2014 · national
Continuity (1)
Related Publication 20150108637A1 · Apr 23, 2015