Semiconductor device
A semiconductor device is disclosed. The semiconductor device includes: a substrate, a gate structure on the substrate, a spacer adjacent to the gate structure, an epitaxial layer in the substrate adjacent to two sides of the spacer, and a dislocation embedded within the epitaxial layer. Preferably, the top surface of the epitaxial layer is lower than the top surface of the substrate, and the top surface of the epitaxial layer has a V-shape.
1. A semiconductor device, comprising:
a substrate;
a gate structure on the substrate;
an epitaxial layer adjacent to the gate structure, wherein a top surface of the epitaxial layer comprises a V-shape having a first side extending along a first direction and a second side extending along a second direction; and
a first dislocation and a second dislocation embedded completely within the epitaxial layer, wherein the first dislocation is extending along the first direction and the second dislocation is extending along the second direction.
2. The semiconductor device of claim 1 , wherein the top surface of the epitaxial layer is lower than the top surface of the substrate.
3. The semiconductor device of claim 1 , wherein the epitaxial layer comprises SiP.