IP Library Patent Application 09871854
Patent Application Utility
App. No. 09/871,854 · Confirmation No. 1472

TEMPERATURE-CONTROLLED CHUCK AND METHOD FOR CONTROLLING THE TEMPERATURE OF A SUBSTANTIALLY FLAT OBJECT

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2001-05-31 TRNA Transmittal of New Application 3 View
2001-05-31 SPEC Specification 18 View
2001-05-31 CLM Claims 7 View
2001-05-31 ABST Abstract 1 View
2001-05-31 DRW Drawings-only black and white line drawings 3 View
2001-05-31 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/871,854
Filed
2001-05-31
Granted
2002-12-17
Pub. No.
US20020179585A1
Art Unit
3761
PTA
0 days