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App. No. 10/060,539 · Confirmation No. 8883

METHOD FOR PROCESSING SEMICONDUCTOR WAFERS IN AN ENCLOSURE WITH A TREATED INTERIOR SURFACE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-07-11 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-11 LET. Miscellaneous Incoming Letter 3 View
2002-01-30 TRNA Transmittal of New Application 2 View
2002-01-30 SPEC Specification 9 View
2002-01-30 CLM Claims 6 View
2002-01-30 ABST Abstract 1 View
2002-01-30 DRW Drawings-only black and white line drawings 2 View
2002-01-30 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/060,539
Filed
2002-01-30
Granted
2003-10-14
Pub. No.
US20030143820A1
Art Unit
2818
PTA
-96 days