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App. No. 10/109,281 · Confirmation No. 7581

METHOD FOR FORMING A SPUTTERED LAYER AND APPARATUS THEREFOR

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-07-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-02 LET. Miscellaneous Incoming Letter 1 View
2002-03-28 TRNA Transmittal of New Application 2 View
2002-03-28 SPEC Specification 17 View
2002-03-28 CLM Claims 7 View
2002-03-28 ABST Abstract 1 View
2002-03-28 DRW Drawings-only black and white line drawings 2 View
2002-03-28 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/109,281
Filed
2002-03-28
Granted
2003-09-16
Pub. No.
US20030183509A1
Art Unit
1753
PTA
0 days