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App. No. 10/321,341 · Confirmation No. 2916

Fluoride in supercritical fluid for photoresist and residue removal

Inventor: Paul E. Schilling
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-01-11 ABN Abandonment 2 View
2006-04-19 CTFR Final Rejection 6 View
2006-04-19 1449 List of References cited by applicant and considered by examiner 3 View
2006-04-19 FWCLM Index of Claims 1 View
2006-04-19 BIB Bibliographic Data Sheet 1 View
2006-02-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-02-09 WFEE Fee Worksheet (SB06) 1 View
2006-02-09 FWCLM Index of Claims 1 View
2006-02-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-02-02 CLM Claims 4 View
2006-02-02 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-02-02 136A Authorization for Extension of Time all replies 2 View
2006-01-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2006-01-19 TRNA Transmittal of New Application 2 View
2006-01-19 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-11-10 TRNA Transmittal of New Application 2 View
2005-11-10 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-11-02 CTNF Non-Final Rejection 9 View
2005-11-02 1449 List of References cited by applicant and considered by examiner 3 View
2005-11-02 892 List of references cited by examiner 1 View
2005-11-02 FWCLM Index of Claims 1 View
2005-11-02 BIB Bibliographic Data Sheet 1 View
2005-08-19 TRNA Transmittal of New Application 2 View
2005-08-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-08-19 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-08-17 RCEX Request for Continued Examination (RCE) 1 View
2005-08-17 XT/ Extension of Time 1 View
2005-08-17 FWCLM Index of Claims 1 View
2005-08-17 WFEE Fee Worksheet (SB06) 1 View
2005-08-17 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-07-15 WFEE Fee Worksheet (SB06) 1 View
2005-07-14 CTAV Advisory Action (PTOL-303) 3 View
2005-07-14 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-07-14 BIB Bibliographic Data Sheet 1 View
2005-06-23 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-06-23 CLM Claims 4 View
2005-06-23 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2005-06-23 LET. Miscellaneous Incoming Letter 1 View
2005-06-23 DRW Drawings-only black and white line drawings 3 View
2005-05-17 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-05-17 TRNA Transmittal of New Application 2 View
2005-05-17 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-04-18 CTFR Final Rejection 11 View
2005-04-18 1449 List of References cited by applicant and considered by examiner 9 View
2005-04-18 892 List of references cited by examiner 1 View
2005-04-18 BIB Bibliographic Data Sheet 1 View
2005-04-18 FWCLM Index of Claims 1 View
2005-04-14 SRNT Examiner's search strategy and results 1 View
2005-02-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-02-15 LET. Miscellaneous Incoming Letter 2 View
2005-02-15 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-01-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-01-21 CLM Claims 4 View
2005-01-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-01-21 136A Authorization for Extension of Time all replies 2 View
2005-01-21 WFEE Fee Worksheet (SB06) 1 View
2005-01-07 FWCLM Index of Claims 1 View
2005-01-05 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-12-23 A.I. Informal or Non-Responsive Amendment 2 View
2004-12-23 SPEC Specification 1 View
2004-12-23 CLM.NE Claim-Amendment Not Entered 4 View
2004-12-23 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-12-23 WFEE Fee Worksheet (SB06) 1 View
2004-10-29 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2004-10-29 FOR Foreign Reference 28 View
2004-09-23 CTNF Non-Final Rejection 11 View
2004-09-23 1449 List of References cited by applicant and considered by examiner 10 View
2004-09-23 892 List of references cited by examiner 1 View
2004-09-23 FOR Foreign Reference 27 View
2004-09-23 FWCLM Index of Claims 1 View
2004-09-23 BIB Bibliographic Data Sheet 1 View
2004-09-23 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-07-08 CLM Claims 4 View
2004-07-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-07-08 WFEE Fee Worksheet (SB06) 1 View
2004-06-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-06-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-06-04 A.I. Informal or Non-Responsive Amendment 2 View
2004-06-04 CLM.NE Claim-Amendment Not Entered 4 View
2004-06-04 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-06-04 WFEE Fee Worksheet (SB06) 1 View
2004-06-04 FWCLM Index of Claims 1 View
2004-05-03 CTRS Requirement for Restriction/Election 6 View
2004-01-29 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-12-19 RESC Rescind Nonpublication Request for Pre Grant Publication 2 View
2003-11-12 IDS Information Disclosure Statement (IDS) Form (SB08) 19 View
2003-11-12 FOR Foreign Reference 2 View
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2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-04 CLM Claims 4 View
2003-04-07 LET. Miscellaneous Incoming Letter 4 View
2003-04-07 A.PE Preliminary Amendment 1 View
2003-04-07 CLM Claims 1 View
2003-04-07 IDS Information Disclosure Statement (IDS) Form (SB08) 20 View
2003-04-07 FOR Foreign Reference 12 View
2003-04-07 FOR Foreign Reference 8 View
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2003-04-07 FOR Foreign Reference 38 View
2003-04-07 FOR Foreign Reference 22 View
2002-12-16 TRNA Transmittal of New Application 2 View
2002-12-16 SPEC Specification 18 View
2002-12-16 CLM Claims 4 View
2002-12-16 ABST Abstract 1 View
2002-12-16 DRW Drawings-only black and white line drawings 7 View
2002-12-16 OATH Oath or Declaration filed 1 View
2002-12-16 WFEE Fee Worksheet (SB06) 1 View
2002-12-16 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/321,341
Filed
2002-12-16
Pub. No.
US20040112409A1
Art Unit
1746