Patent Application
Utility
App. No. 10/630,349
· Confirmation No. 9297
ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
Abandoned -- Failure to Pay Issue Fee
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-12-13 | ABN |
Abandonment | 2 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-07-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-28 | FWCLM |
Index of Claims | 1 | View | |
| 2004-07-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-13 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2004-07-13 | SPEC |
Specification | 1 | View | |
| 2004-07-13 | CLM |
Claims | 3 | View | |
| 2004-07-13 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-07-13 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-07-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-13 | FWCLM |
Index of Claims | 1 | View | |
| 2004-07-09 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-07-09 | CFILE |
Request for Corrected Filing Receipt | 4 | View | |
| 2004-06-23 | CTEQ |
Ex Parte Quayle Action | 5 | View | |
| 2004-06-23 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-06-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-06-23 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-18 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-02-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2004-02-06 | C.AD |
Change of Address | 2 | View | |
| 2004-01-13 | XT/ |
Extension of Time | 2 | View | |
| 2004-01-13 | C.AD |
Change of Address | 1 | View | |
| 2004-01-13 | DRW |
Drawings-only black and white line drawings | 24 | View | |
| 2003-10-27 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2003-07-29 | TRNA |
Transmittal of New Application | 4 | View | |
| 2003-07-29 | SPEC |
Specification | 50 | View | |
| 2003-07-29 | CLM |
Claims | 2 | View | |
| 2003-07-29 | DRW |
Drawings-only black and white line drawings | 23 | View | |
| 2003-07-29 | OATH |
Oath or Declaration filed | 18 | View | |
| 2003-07-29 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-07-29 | CLM |
Claims | 2 | View | |
| 2003-07-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-07-29 | ABST |
Abstract | 1 | View |
Inventors
N. William Parker
Fairfield, CA
Alan D. Brodie
Palo Alto, CA
George Xinsheng Guo
Los Altos Hills, CA
Edward M. Yin
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
250/396R
B82Y10/00
H01J37/3177
B82Y40/00
H01J37/3174
Prosecution
- Examiner
- NGUYEN, KIET TUAN
- Art Unit
- 2881
- Docket No.
- 58884-0305279
- Confirmation No.
- 9297
Publication
- Pub. No.
- US20040119021A1
- Pub. Date
- 2004-06-24
Parent
is a Continuation of
→
App. 10/243,585
· US 6,617,587
Filed 2002-09-12
· Patented Case
Parent
is a Continuation of
→
App. 09/722,079
Filed 2000-11-23
· Abandoned -- Failure to Respond to an Office Action
Parent
Claims priority from a provisional application
→
App. 60/167,442
Filed 1999-11-23
· Provisional Application Expired
from
MOTOROLA, INC
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-07
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Quick Facts
- App. No.
- 10/630,349
- Filed
- 2003-07-29
- Pub. No.
- US20040119021A1
- Examiner
- NGUYEN, KIET TUAN
- Art Unit
- 2881
External Links