Multi-layered superhard nanocomposite coatings
View Patent ↗Superhard nanocomposite coatings which are applicable to coating contact surfaces on substrates in a variety of industrial processes are disclosed. In a typical embodiment, the superhard nanocomposite coating includes a refractory metal silicon nitride coating layer having silicon in a concentration of from about 6 atomic percent to about 12 atomic percent.
1. A superhard nanocomposite coating on a machining tool substrate comprising:
a refractory metal silicon nitride coating layer consisting essentially of nanometer size particles of crystalline refractory metal nitride in a matrix of amorphous silicon nitride, the nanocomposite coating having silicon in a concentration of from about 6 atomic percent to about 12 atomic percent; the nanocomposite coating layer being separated from the substrate by an interfacial layer consisting essentially of refractory metal on the substrate, a base layer consisting essentially of refractory metal and nitrogen on the interfacial layer, and a transition layer consisting essentially of refractory metal, silicon and nitrogen on the base layer, the nanocomposite layer being on the transition layer.
2. The superhard nanocomposite coating of claim 1 wherein said refractory metal is titanium, and the thickness of the nanocomposite coating layer is in the range of one to two micrometers.
3. The superhard nanocomposite coating of claim 1 wherein said silicon is present in said nanocomposite, silicon nitride containing coating layer in a concentration of from about 8 atomic percent to about 12 atomic percent.
4. The superhard nanocomposite coating of claim 3 wherein said refractory metal is titanium and the thickness of the nanocomposite coating layer is in the range of one to two micrometers.
5. The superhard nanocomposite coating of claim 1 wherein said refractory metal is tantalum or tungsten.
6. The superhard nanocomposite coating of claim 5 wherein said silicon is present in said nanocomposite, silicon nitride containing coating layer in a concentration of from about 8 atomic percent to about 12 atomic percent.
7. The superhard nanocomposite coating of claim 3 wherein said silicon is present in said silicon nitride coating layer in a concentration of at least about 9 atomic percent.
8. The superhard nanocomposite coating of claim 7 wherein said refractory metal is titanium, tantalum or tungsten.
9. A superhard nanocomposite coating on a machining tool substrate, comprising:
a multi-layered coating structure including a superficial coating layer consisting essentially of nanometer size particles of crystalline titanium nitride in a matrix of amorphous silicon nitride, the superficial coating layer comprising silicon in a concentration of from about 6 atomic percent to about 12 atomic percent; the nanocomposite coating layer being separated from the substrate by a micrometer scale thick interfacial layer consisting essentially of titanium on the substrate, a micrometer scale thick base layer consisting essentially of titanium nitride on the interfacial layer, and a micrometer scale thick transition layer consisting essentially of titanium, silicon and nitrogen on the base layer, the superficial coating layer being on the transition layer.
10. The superhard nanocomposite coating of claim 9 wherein said silicon is present in said superficial coating layer in a concentration of from about 8 atomic percent to about 12 atomic percent.
11. The superhard nanocomposite coating of claim 10 wherein said silicon is present in said superficial coating layer in a concentration of at least about 9 atomic percent.