Method for manufacturing semiconductor device
View Patent ↗An insulating-film composition containing an insulating-film precursor and a pore-generating material is applied onto a surface of a semiconductor substrate, and a first heat treatment is performed to polymerize the insulating-film precursor without vaporizing the pore-generating material, to form a non-porous insulating film. Next, a resist pattern is formed on the non-porous insulating film, and dry etching is performed, using the resist pattern as a mask, to form a trench in the non-porous insulating film. After removing the resist pattern by ashing, the surface of the semiconductor substrate is cleaned. Next, a second heat treatment is performed to remove the pore-generating material from the non-porous insulating film and to form a porous insulating film. Thereafter, a copper layer is deposited in the trench on a barrier-metal film to form copper wiring.
1. A method for manufacturing a semiconductor device comprising:
applying an insulating-film composition containing an insulating-film precursor and a pore-generating material onto a surface of a semiconductor substrate;
performing a first heat treatment of said insulating-film composition to polymerize said insulating-film precursor, without vaporizing said pore-generating material, to form a non-porous insulating film;
forming a resist pattern on said non-porous insulating film;
etching said non-porous insulating film using said resist pattern as a mask to form a trench in said non-porous insulating film;
removing said resist pattern by ashing;
cleaning the surface of said semiconductor substrate after the ashing;
performing a second heat treatment of said non-porous insulating film after the cleaning, thereby removing said pore-generating material from said non-porous insulating film and forming a porous insulating film;
forming a barrier-metal film on an inner surface of said trench; and
filling said trench with a copper layer contacting said barrier-metal film.
2. The method for manufacturing a semiconductor device according to claim 1 , including performing the first heat treatment at a temperature not exceeding 350° C.
3. The method for manufacturing a semiconductor device according to claim 1 , including performing the second heat treatment at a temperature not exceeding 450° C.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein said porous insulating film is selected from the group consisting of a methyl silsesquioxane film, a hydrogenated silsequioxane film, an organic-inorganic hybrid film, a polyimide derivative film, a polyallyl ether derivative film, a polyquinon derivative film, and a poly-p-xylene derivative film.
5. A method for manufacturing a semiconductor device comprising:
applying an insulating-film composition containing an insulating-film precursor and a pore-generating material onto a surface of a semiconductor substrate;
performing a first heat treatment of said insulating-film composition to polymerize said insulating-film precursor without vaporizing said pore-generating material to form a non-porous insulating film;
forming a chemical mechanical polishing (CMP) stopper film on said non-porous insulating film;
forming a resist pattern on said CMP stopper film;
dry etching said CMP stopper film and said non-porous insulating film using said resist pattern as a mask to form a trench in said non-porous insulating film;
removing said resist pattern by ashing;
cleaning the surface of said semiconductor substrate after the ashing;
performing a second heat treatment of said non-porous insulating film after the cleaning, thereby removing said pore-generating material from said non-porous insulating film and forming a porous insulating film;
forming a barrier-metal film on said CMP stopper film and on an inner surface of said trench;
forming a copper layer on said barrier-metal film, filling said trench; and
polishing said copper layer and said barrier-metal film by CMP to form copper wiring.
6. The method for manufacturing a semiconductor device according to claim 5 , including performing the first heat treatment at a temperature not exceeding 350° C.
7. The method for manufacturing a semiconductor device according to claim 5 , including performing the second heat treatment at a temperature not exceeding 450° C.
8. The method for manufacturing a semiconductor device according to claim 5 , wherein said porous insulating film is selected from the group consisting of a methyl silsesquioxane film, a hydrogenated silsequioxane film, an organic-inorganic hybrid film, a polyimide derivative film, a polyallyl ether derivative film, a polyquinon derivative film, and a poly-p-xylene derivative film.
9. The method for manufacturing a semiconductor device according to claim 1 , wherein said pore-generating material is selected from the group consisting of vinyl ether compounds, vinyl pyridine compounds, styrene compounds, alkyl esters vinyl compounds, acrylic acid compounds, meth acrylic compounds, and polymers including alkylene oxide units.
10. The method for manufacturing a semiconductor device according to claim 5 , wherein said pore-generating material is selected from the group consisting of vinyl ether compounds, vinyl pyridine compounds, styrene compounds, alkyl esters vinyl compounds, acrylic acid compounds, meth acrylic compounds, and polymers including alkylene oxide units.