Solution and method for the treatment of a substrate, and semiconductor component
View Patent ↗An embodiment of the invention provides a method for the treatment of a substrate made of paper or a substrate containing paper as support material for a semiconductor component. In an embodiment, the substrate surface is contacted with a solution comprising at least one phenol-containing base polymer and/or copolymer and a crosslinker component. A polymer formulation deposits from the solution onto the surface. The solution may further include an acid catalyst. Embodiments include a semiconductor component formed according to the method of the invention.
1. A method for treatment of a substrate made of paper or for treatment of a paper-containing substrate as support material for a semiconductor component, the method comprising:
contacting a surface of the substrate with a solution, wherein the solution comprises at least one phenol-containing base polymer and a crosslinker component; and
depositing a polymer layer from the solution on the surface.
2. The method of claim 1 , wherein that the phenol-containing base polymer is selected from the group consisting essentially of a poly-4-vinylphenol, a poly-4-vinylphenol-co-2-hydroxyethyl methacrylate, a poly-4-vinylphenol-co-methyl methacrylate, and combinations thereof.
3. The method of claim 2 , wherein the crosslinker component is a di- or tribenzyl alcohol compound.
4. The method of claim 2 , wherein the crosslinker component comprises at least one of a formaldehyde-releasing component and an electrophilic crosslinker system.
5. The method of claim 2 , wherein the crosslinker component comprises methylated polymelamine-co-formaldehyde and 4-hydroxymethylbenzyl alcohol/4-toluenesulfonic acid.
6. The method of claim 2 , wherein the crosslinker component comprises one of the following compounds:
wherein R 1 comprises —O—, —S—, —SO 2 —, —S 2 —, —(CH 2 ) x — with x=1-10, or one or more of the following structures
and wherein each occurrence of R 2 independently comprises an alkyl having 1 to 10 carbon atoms or an aryl.
7. The method of claim 1 , wherein the solution further comprises a thermal acid generator.
8. The method of claim 7 , wherein the thermal acid generator transfers a proton to a hydroxyl group of a benzyl alcohol at a temperature less than about 150° C.
9. The method of claim 7 , wherein the thermal acid generator is 4-toluenesulfonic acid.
10. The method of claim 1 , wherein the solution further comprises a photoacid generator.
11. The method of claim 10 , further comprising irradiating the solution with UV light thereby generating a photoacid to effect the transfer of a proton to the hydroxyl group of a benzyl alcohol.
12. The method of claim 10 , wherein the photoacid generator is a sulfonium or an iodonium salt.
13. The method of claim 1 , wherein the solution further comprises a solvent.
14. The method of claim 13 , wherein the solvent consists essentially of an alcohol, dioxan, N-methylpyrrolidone (NMP), γ-butyrolactone, xylene, propylene glycol monomethyl ether acetate (PGMEA), and combinations thereof.
15. The method of claim 13 , wherein the solvent is n-butanol.
16. The method claim 1 , wherein the solution further comprises an acid catalyst, and wherein a proportion by mass of the base polymer, the crosslinker component and the acid catalyst in the solution is between about 5% and about 20%.
17. The method of claim 16 , wherein the solution comprises about 100 parts of the base polymer, between about 10 parts and about 20 parts of the crosslinker component, and between about 1 part and about 10 parts of the acid catalyst.
18. The method of claim 16 , wherein the solution comprises about 100 parts of the base polymer, between about 10 parts and about 20 parts of the crosslinker component, and between about 0.2 parts and about 10 parts of the acid catalyst, the acid catalyst comprising a photoacid generator.
19. The method of claim 1 , wherein the polymer layer deposits areally on the surface of the substrate.
20. The method of claim 1 , wherein contacting the surface of the substrate with the solution and wherein depositing the polymer layer comprises using a process selected from a group consisting of spin coating, spray coating, printing, dipping, and combinations thereof.
21. The method of claim 1 , further comprising crosslinking the solution comprising the at least one phenol-containing base polymer on the substrate.
22. The method of claim 21 , wherein crosslinking the solution comprises thermally crosslinking the at least one phenol-containing base polymer at a temperature of between about 120° C. and about 200° C.
23. The method of claim 1 , wherein the at least one phenol-containing base polymer comprises a copolymer.