Stacked type semiconductor device and method of fabricating stacked type semiconductor device
View Patent ↗A stacked type semiconductor device includes semiconductor devices, interposers by which the semiconductor devices are stacked, the interposers having electrodes provided on sides thereof, and a connection substrate connecting the electrodes together. The electrodes provided on the sides of the interposers may be connected to the connection substrate by one of an electrically conductive adhesive or an anisotropically conductive film.
1. A stacked type semiconductor device structure comprising:
semiconductor devices;
interposers that are used to stack the semiconductor devices, wherein the interposers comprise electrodes that are provided on and in contact with sides thereof; and
a connection substrate electrically connecting the electrodes together wherein the electrodes are provided in parts of via holes.
2. The stacked type semiconductor device structure as claimed in claim 1 , wherein the electrodes provided on the sides of the interposers are provided in parts of via holes defined by cutting and an electrically conductive resin with which the via holes are filled.
3. The stacked type semiconductor device structure as claimed in claim 1 , wherein the electrodes provided on the sides of the interposers are connected to the connection substrate by one of an electrically conductive adhesive or an anisotropically conductive film.
4. The stacked type semiconductor device structure as claimed in claim 1 , wherein the connection substrate has one of a single-layer interconnection structure or a multi-layer interconnection structure.
5. The stacked type semiconductor device structure as claimed in claim 1 , wherein each of the interposers has multiple sides on which the electrodes are connected to the connection substrate.
6. The stacked type semiconductor device structure as claimed in claim 1 , further comprising an electronic component provided on an inside surface of the connection substrate.
7. A method of fabricating a stacked type semiconductor device comprising:
stacking semiconductor devices using interposers and providing electrodes on and in contact with the sides of the interposers wherein the electrodes are formed by cutting into the interposers along via holes provided therein; and
electrically connecting the electrodes together with a connection substrate.
8. The method as claimed in claim 7 , comprising forming the electrodes by cutting into the interposers along via holes provided therein, and filling the via holes with an electrically conductive adhesive.
9. The method as claimed in claim 7 , comprising:
forming the electrodes by cutting into the interposers along via holes provided therein;
providing a metal film on inner walls of the via holes; and
supplying one of an electrically conductive adhesive or an anisotropically conductive film to the via holes.