Test semiconductor device and method for determining Joule heating effects in such a device
View Patent ↗Method and test structures for determining heating effects in a test semiconductor device ( 10 ) are provided. The test device may include a first conductive metal structure ( 15 1 - 15 6 ) for accepting a flow of electric current that causes a heating effect. The test device may further include a second conductive metal structure proximate ( 12 1 - 12 6 ) the first conductive structure for obtaining resistivity changes in response to the heating effect. The resistivity changes are indicative of temperature changes due to the heating effect.
1. A method for determining heating effects in a multi-level semiconductor device, said method comprising:
providing a first conductive metal structure for accepting a flow of electric current that causes a heating effect;
providing a second conductive metal structure proximate to said first conductive structure, said second conductive metal structure exhibiting resistivity changes in response to said heating effect;
comparing said resistivity changes relative to a baseline of resistivity values for said second conductive metal structure; and
based on the results of said comparison, determining temperature changes in response to said heating effect at a location corresponding to said second conductive metal structure.
2. The method of claim 1 wherein said step of providing a first conductive metal structure for accepting a flow of electric current comprises providing said first conductive structure at each level of said multi-level device.
3. The method of claim 1 wherein said step of providing a second conductive metal structure for providing an indication of resistivity changes comprises providing said second conductive metal structure at each level of said multi-level device.
4. The method of claim 1 wherein said flow of electric current comprises alternating current (AC).
5. The method of claim 4 further comprising controlling said AC current to have an amperage and frequency sufficiently close to emulate an amperage and frequency of an AC signal that an operational interconnect line may be subjected to when used in a semiconductor circuit design.
6. The method of claim 5 further comprising controlling said flow of AC current to be cycled on and off with a desired duty cycle to emulate a time-varying thermal cycle that an operational interconnect may be subjected to when used in a semiconductor circuit design.