IP Library › Patent Application 11638499
Patent Application Utility
App. No. 11/638,499 · Confirmation No. 4612

METHOD OF PATTERNING MULTIPLE-LAYERED RESIST FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Inventor: Eiichi Soda
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2010-06-23 ISSUE.NTF Issue Notification 1 View
2010-06-03 IFEE Issue Fee Payment (PTO-85B) 1 View
2010-06-03 WFEE Fee Worksheet (SB06) 2 View
2010-06-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-16 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2010-03-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2010-03-16 SRFW Search information including classification, databases and other search related notes 1 View
2010-03-16 SRNT Examiner's search strategy and results 3 View
2010-02-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-02-25 CLM Claims 2 View
2010-02-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2010-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-02-25 WFEE Fee Worksheet (SB06) 1 View
2009-11-25 CTNF Non-Final Rejection 11 View
2009-09-22 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-07-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-07-02 CLM Claims 4 View
2009-07-02 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2009-07-02 WFEE Fee Worksheet (SB06) 2 View
2009-07-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-07-02 XT/ Extension of Time 1 View
2009-07-02 WFEE Fee Worksheet (SB06) 1 View
2009-03-04 CTNF Non-Final Rejection 7 View
2009-03-04 892 List of references cited by examiner 1 View
2009-03-04 SRFW Search information including classification, databases and other search related notes 1 View
2009-03-04 FOR Foreign Reference 4 View
2009-03-04 SRNT Examiner's search strategy and results 2 View
2008-12-29 RCEX Request for Continued Examination (RCE) 3 View
2008-12-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-12-29 CLM Claims 3 View
2008-12-29 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2008-12-29 WFEE Fee Worksheet (SB06) 2 View
2008-12-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-12-29 WFEE Fee Worksheet (SB06) 1 View
2008-08-29 CTFR Final Rejection 6 View
2008-08-29 SRFW Search information including classification, databases and other search related notes 1 View
2008-05-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-05-16 CLM Claims 3 View
2008-05-16 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2008-05-16 DRW Drawings-only black and white line drawings 2 View
2008-05-16 WFEE Fee Worksheet (SB06) 1 View
2008-02-20 CTNF Non-Final Rejection 9 View
2008-02-20 1449 List of References cited by applicant and considered by examiner 1 View
2008-02-20 892 List of references cited by examiner 1 View
2008-02-20 FOR Foreign Reference 7 View
2008-02-20 BIB Bibliographic Data Sheet 1 View
2008-02-20 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-17 SRNT Examiner's search strategy and results 1 View
2007-11-05 SRNT Examiner's search strategy and results 1 View
2007-11-02 SRNT Examiner's search strategy and results 2 View
2007-10-04 SRNT Examiner's search strategy and results 3 View
2007-06-21 NTC.PUB Notice of Publication 1 View
2007-01-11 APP.FILE.REC Filing Receipt 3 View
2006-12-14 TRNA Transmittal of New Application 2 View
2006-12-14 SPEC Specification 28 View
2006-12-14 CLM Claims 3 View
2006-12-14 ABST Abstract 1 View
2006-12-14 DRW Drawings-only black and white line drawings 13 View
2006-12-14 OATH Oath or Declaration filed 2 View
2006-12-14 WFEE Fee Worksheet (SB06) 1 View
2006-12-14 WFEE Fee Worksheet (SB06) 1 View
2006-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-12-14 FOR Foreign Reference 5 View
2006-12-14 FOR Foreign Reference 6 View
2006-12-14 FOR Foreign Reference 12 View
2006-12-14 FOR Foreign Reference 11 View
2006-12-14 FRPR Certified Copy of Foreign Priority Application 29 View
2006-12-14 ADS Application Data Sheet 3 View
2006-12-14 136A Authorization for Extension of Time all replies 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
11/638,499
Filed
2006-12-14
Granted
2010-07-13
Pub. No.
US20070141764A1
Art Unit
1792
PTA
-58 days