Buried metal-semiconductor alloy layers and structures and methods for fabrication thereof
View Patent ↗A method for forming a metal-semiconductor alloy layer uses particular thermal annealing conditions to provide a stress free metal-semiconductor alloy layer through interdiffusion of a buried semiconductor material layer and a metal-semiconductor alloy forming metal layer that contacts the buried semiconductor material layer within an aperture through a capping layer beneath which is buried the semiconductor material layer. A resulting semiconductor structure includes the metal-semiconductor alloy layer that further includes an interconnect portion beneath the capping layer and a contiguous via portion that penetrates at least partially through the capping layer. Such a metal-semiconductor alloy layer may be located interposed between a substrate and a semiconductor device having an active doped region.
1. A microelectronic structure comprising a metal silicide consisting essentially of a semiconductor element and a metal element selected from the group consisting of nickel, cobalt, iron, titanium, tungsten, erbium, ytterbium, platinum, vanadium, and combinations thereof, the metal silicide located interposed between a buried dielectric layer of a substrate and a dielectric capping layer, the metal silicide comprising an interconnect portion of a single material layer beneath the capping layer and two via portions that are contiguous with the interconnect portion and penetrating through the capping layer, wherein one of the two via portions is present at each end of the interconnect portion, wherein at least the interconnect portion of the metal silicide is free of stress and wherein an entirety of a bottommost surface of said interconnect portion of said metal silicide is in direct contact with an uppermost surface of said buried dielectric layer of a substrate.
2. The microelectronic structure of claim 1 wherein at least one of the two via portions serves as a vertical interconnect for at least one of a vertically separated semiconductor layer and a vertically separated device within the semiconductor structure.
3. The microelectronic structure of claim 1 wherein the metal silicide is included within at least one of a purely electronic microelectronic structure, a microelectromechanical system (MEMS) structure and an optoelectronic structure.
4. The microelectronic structure of claim 1 , further comprising an isolation region present at each end of said interconnect portion.
5. The microelectronic structure of claim 4 , wherein said isolation region is in direct contact with an outer sidewall of said interconnect portion.
6. The microelectronic structure of claim 4 , wherein a bottom portion of said dielectric capping layer contacts a portion of a topmost surface of said isolation region.
7. The microelectronic structure of claim 1 , wherein a topmost surface of at least one of said via portions is above a plane of the topmost surface of said dielectric capping layer.
8. The microelectronic structure of claim 7 , wherein a topmost surface of said two via portions is above a plane of the topmost surface of said dielectric capping layer.
9. The microelectronic structure of claim 1 , wherein said substrate is a semiconductor-on-insulator substrate comprising a base semiconductor substrate, said buried dielectric layer and a surface semiconductor layer.
10. The microelectronic structure of claim 1 , wherein said substrate is a hybrid orientation (HOT) substrate, wherein said HOT substrate has at least two crystallographic orientations.
11. A microelectronic structure comprising a metal silicide comprising a semiconductor element and a metal element, the metal silicide located interposed between a buried dielectric layer of a substrate and a dielectric capping layer, the metal silicide comprising two interconnect portions beneath the capping layer and two via portions that are contiguous with the two interconnect portions and penetrate through said dielectric capping layer, wherein one of the two via portions is present on an end portion of each of the interconnect portions, wherein at least the interconnect portions of the metal silicide is free of stress and wherein an entirety of a bottommost surface of said interconnect portions of said metal silicide is in direct contact with an uppermost surface of said buried dielectric layer of a substrate.
12. The microelectric structure of claim 11 , wherein said metal element is selected from the group consisting of nickel, cobalt, iron, titanium, tungsten, erbium, ytterbium, platinum, vanadium, and combinations thereof.