Use of a polymer spacer and Si trench in a bitline junction of a flash memory cell to improve TPD characteristics
View Patent ↗Memory devices having improved TPD characteristics and methods of making the memory devices are provided. The memory devices contain two or more memory cells on a semiconductor substrate and bit line dielectrics between the memory cells. The bit line dielectrics can extend into the semiconductor. The memory cell contains one or more charge storage nodes, a first poly gate, a pair of first bit lines, and a pair of second bit lines. The second bit line can be formed at a higher energy level, a higher concentration of dopants, or a combination thereof compared to an energy level and a concentration of dopants of the first bit line.
1. A method of making a memory cell, comprising:
providing features and bit line openings therebetween on a semiconductor substrate, the bit line openings comprising bit line trenches that extend into the semiconductor substrate;
forming first bit lines in the semiconductor substrate under the bit line trenches;
forming polymer spacers adjacent side surfaces of the features and side surfaces of the bit line trenches; and
forming second bit lines in the semiconductor substrate under the bit line trenches, the second bit lines being formed at a higher energy level, a higher concentration of dopants, or a combination thereof compared to an energy level and a concentration of dopants of the first bit lines.
2. The method of claim 1 , wherein forming second bit lines comprises implantation of one or more dopants using the polymer spacers as an implant screen.
3. The method of claim 1 further comprising removing the polymer spacers and forming bit line dielectrics in the bit line openings.
4. The method of claim 3 wherein forming the polymer spacers and removing the polymer spacers are performed within a single apparatus.
5. The method of claim 3 , wherein forming the bit line dielectrics comprises a high temperature oxide formation process.
6. The method of claim 1 further comprising forming word lines over the semiconductor substrate.
7. The method of claim 1 wherein the polymer spacer comprises at least one selected from the group consisting of polyimides, fluorinated polyimides, polysilsequioxanes such as hydrogen polysilsequioxanes, methyl polysilsequioxanes, butyl polysilsequioxanes, and phenyl polysilsequioxanes, benzocyclobutenes (BCB), fluorinated benzocyclobutene, polyphenylene, polysilazanes, polyphenylquinoxaline, copolymers of 2,2-bistrifluoromethyl-4,5-difluoro-1,3-dioxole, perfluoroalkoxy resin, fluorinated ethylene propylene, fluoromethacrylate, poly(arylene ether), fuorinated poly(arylene ether), fluorinated parylenes, poly(p-xylxylenes), fluorinated poly(p-xylxylenes), parylene F, parylene N, parylene C, parylene D, amorphous polytetrafluoroethylene, polyquinoline, polyphenylquinoxalines, and polymeric photoresist materials.
8. A method of electrically isolating memory cells from each other on a semiconductor substrate, comprising:
providing features and first openings therebetween on a semiconductor substrate;
forming bit line trenches under the first openings in the semiconductor substrate, thereby forming bit line openings;
forming first bit lines in the semiconductor substrate under the bit line trenches;
forming polymer spacers adjacent side surfaces of the features and side surfaces of the bit line trenches; and
forming second bit lines in the semiconductor substrate under the bit line trenches, the second bit lines being formed at a higher energy level, a higher concentration of dopants, or a combination thereof compared to an energy level and a concentration of dopants of the first bit lines.
9. The method of claim 8 further comprising forming bit line dielectrics in the bit line openings by a high temperature oxide formation process.
10. The method of claim 8 further comprising removing the polymer spacers and forming bit line dielectrics in the bit line openings.
11. The method of claim 10 wherein forming the polymer spacers and removing the polymer spacers are performed within a single apparatus.
12. The method of claim 8 wherein the polymer spacer comprises at least one selected from the group consisting of polyimides, fluorinated polyimides, polysilsequioxanes such as hydrogen polysilsequioxanes, methyl polysilsequioxanes, butyl polysilsequioxanes, and phenyl polysilsequioxanes, benzocyclobutenes (BCB), fluorinated benzocyclobutene, polyphenylene, polysilazanes, polyphenylquinoxaline, copolymers of 2,2-bistrifluoromethyl-4,5-difluoro-1,3-dioxole, perfluoroalkoxy resin, fluorinated ethylene propylene, fluoromethacrylate, poly(arylene ether), fuorinated poly(arylene ether), fluorinated parylenes, poly(p-xylxylenes), fluorinated poly(p-xylxylenes), parylene F, parylene N, parylene C, parylene D, amorphous polytetrafluoroethylene, polyquinoline, polyphenylquinoxalines, and polymeric photoresist materials.
13. The method of claim 1 , wherein the first bit lines are formed in the semiconductor substrate adjacent the side surfaces of the bit line trenches and under the bit line trenches.
14. The method of claim 1 , wherein the second bit lines are formed in the semiconductor substrate under the bit line trenches between the polymer spacers.
15. The method of claim 1 , wherein the second bit lines are formed by implantation of one or more dopants in the semiconductor substrate under the bit line trenches between the polymer spacers, wherein the polymer spacers serve as an implant screen.
16. The method of claim 1 , wherein providing the features comprises:
forming a dielectric layer over the semiconductor substrate, a first poly layer over the dielectric layer, and a first mask layer over the first poly layer;
forming undercut portions of the dielectric layer, thereby forming openings between the semiconductor substrate and the first poly layer; and
forming charge storage nodes in the openings.
17. The method of claim 8 , wherein the first bit lines are formed in the semiconductor substrate adjacent the side surfaces of the bit line trenches and under the bit line trenches.
18. The method of claim 8 , wherein the second bit lines are formed in the semiconductor substrate under the bit line trenches between the polymer spacers.
19. The method of claim 8 , wherein the second bit lines are formed by implantation of one or more dopants in the semiconductor substrate under the bit line trenches between the polymer spacers, wherein the polymer spacers serve as an implant screen.
20. The method of claim 8 , wherein the feature comprises charge storage nodes and a center dielectric between the charge storage nodes, the charge storage node comprising at least three layers comprising a first insulating layer, a charge storage dielectric layer, and a second insulating layer.