Semiconductor FinFET structures with encapsulated gate electrodes and methods for forming such semiconductor FinFET structures
View Patent ↗Semiconductor structures in which the gate electrode of a FinFET is masked from the process introducing dopant into the fin body of the FinFET to form source/drain regions and methods of fabricating such semiconductor structures. The gate doping, and hence the work function of the gate electrode, is advantageously isolated from the process that dopes the fin body to form the source/drain regions. The sidewalls of the gate electrode are covered by sidewall spacers that are formed on the gate electrode but not on the sidewall of the fin body.
1. A semiconductor structure comprising:
a dielectric substrate;
a fin body on said dielectric substrate, said fin body including a central channel region and first and second end regions flanking the central channel region;
a gate electrode on said dielectric substrate and intersecting said channel region of said fin body, said gate electrode including a first surface coextensive with said dielectric substrate, a plurality of sidewalls, and a second surface connected by said sidewalls with said first surface;
a cap of a first dielectric material covering said second surface of said gate electrode, said cap including an upper surface and a plurality of sidewalls extending from said upper surface to said second surface of said gate electrode;
a cap spacer flanking said sidewalls of said cap, said cap spacer extending vertically from said upper surface of said cap toward said second surface of said gate electrode, and said cap spacer covering 50% to 75% of each of said sidewalls of said cap measured from said upper surface of said cap; and
a first sidewall spacer of a second dielectric material underlying said cap spacer and covering said sidewalls of said gate electrode.
2. The semiconductor structure of claim 1 further comprising:
a second sidewall spacer of a third dielectric material positioned between said first sidewall spacer and said sidewalls of said gate electrode, said third dielectric material having a different composition than said second dielectric material.
3. The semiconductor structure of claim 1 wherein said first dielectric material and said second dielectric material have different compositions.
4. The semiconductor structure of claim 1 wherein said dielectric substrate is a buried dielectric layer of a semiconductor-on-insulator wafer, and said fin body is formed from a semiconductor-on-insulator layer of said semiconductor-on-insulator wafer.
5. The semiconductor structure of claim 1 wherein said first end region includes a first source/drain region and said second end region includes a second source/drain regions, said first and second source/drain regions being doped with a dopant concentration, and said gate electrode being substantially free of said dopant concentration.
6. The semiconductor structure of claim 1 wherein said first and second end regions project laterally from said sidewall of said gate electrode, and a sidewall of said first and second regions is free of said first sidewall spacer.