Deposited semiconductor structure to minimize n-type dopant diffusion and method of making
In deposited silicon, n-type dopants such as phosphorus and arsenic tend to seek the surface of the silicon, rising as the layer is deposited. When a second undoped or p-doped silicon layer is deposited on n-doped silicon with no n-type dopant provided, a first thickness of this second silicon layer nonetheless tends to include unwanted n-type dopant which has diffused up from lower levels. This surface-seeking behavior diminishes when germanium is alloyed with the silicon. In some devices, it may not be advantageous for the second layer to have significant germanium content. In the present invention, a first heavily n-doped semiconductor layer (preferably at least 10 at % germanium) is deposited, followed by a silicon-germanium capping layer with little or no n-type dopant, followed by a layer with little or no n-type dopant and less than 10 at % germanium. The germanium in the first layer and the capping layer minimizes diffusion of n-type dopant into the germanium-poor layer above.
1. A method of forming a microelectronic structure, the method comprising:
forming a first layer comprising semiconductor material that is very heavily n-doped before being annealed, having a first-layer before-anneal dopant concentration, the first layer being between about 50 and 200 angstroms thick, wherein the first layer is formed above a substrate, and wherein the first layer is heavily n-doped after being annealed, having a first-layer after-anneal dopant concentration, the first-layer before-anneal dopant concentration exceeding the first-layer after-anneal concentration;
forming a second layer comprising semiconductor material that is not heavily doped before being annealed, having a second-layer before-anneal dopant concentration, the second layer being about as thick as the first layer, wherein the second layer is formed above and in contact with the first layer, and wherein the second layer comprises heavily n-doped semiconductor material after being annealed, having a second-layer after-anneal dopant concentration, the second-layer after-anneal dopant concentration exceeding the second-layer before-anneal concentration; and
forming a third layer comprising semiconductor material that is above and in contact with the second layer and that is not heavily n-doped before or after being annealed, the third layer having a third-layer dopant concentration.
2. The method of claim 1 , wherein the first layer and the second layer comprise semiconductor material comprising a similar mixture of semiconductors.
3. The method of claim 2 , wherein the first layer and the second layer comprise a silicon-germanium alloy that is at least 10 at % germanium.
4. The method of claim 2 , wherein the first layer and the second layer comprise a silicon-germanium alloy that is less than 10 at % germanium.
5. The method of claim 2 , wherein the third layer comprises a silicon-germanium alloy that is at least 10 at % germanium.
6. The method of claim 5 wherein the third layer comprises at least 20 at % germanium.
7. The method of claim 5 , further comprising:
forming a fourth layer comprising a semiconductor material that is above and in contact with the third layer and that is not heavily n-doped, wherein the fourth layer comprises silicon or a silicon-germanium alloy that is less than 10 at % germanium.
8. The method of claim 7 , wherein the fourth layer comprises no more than 5 at % germanium.
9. The method of claim 1 , wherein the first, second, and third layers are portions of a vertically oriented junction diode.
10. The method of claim 9 , wherein the diode is a p-i-n diode, and the third layer is undoped or lightly doped.
11. The method of claim 1 , further comprising forming a fourth layer comprising a semiconductor material that is above and in contact with the third layer and that is not heavily n-doped, wherein the fourth layer comprises silicon or a silicon-germanium alloy that is less than 10 at % germanium.
12. The method of claim 11 , further comprising patterning and etching the first, second, third and fourth layers to form a pillar.
13. The method of claim 11 , wherein:
the fourth layer is heavily p-doped; and the fourth layer is a portion of a vertically oriented junction diode; and
wherein the third layer comprises a silicon-germanium alloy that is at least 10 at % germanium.
14. The method of claim 13 , wherein:
the diode is vertically disposed between a bottom conductor and a top conductor; and
wherein a nonvolatile memory cell comprises a portion of the bottom conductor, the diode, and a portion of the top conductor.
15. The method of claim 14 , wherein the non-volatile memory cell resides in a monolithic three dimensional memory array, the method further comprising:
a) forming a first memory level above the substrate, the first memory level comprising:
i) a plurality of the bottom conductors, the bottom conductors being substantially parallel and substantially coplanar;
ii) a plurality of the top conductors, the top conductors being substantially parallel and substantially coplanar; and
iii) a plurality of the non-volatile memory cells; and
b) forming at least a second memory level monolithically above the first memory level.
16. The method of claim 14 , wherein the memory cell further comprises a reversible state-change element, the reversible state-change element disposed between the diode and the bottom conductor or between the diode and the top conductor.
17. The method of claim 16 , wherein the reversible state-change element comprises a layer of a resistivity-switching metal oxide or nitride compound selected from the group consisting of NiO, Nb 2 O 5 , TiO 2 , HfO 2 , Al 2 O 3 , CoO, MgO x , CrO 2 , VO, BN, and AlN.
18. The method of claim 1 , wherein the second-layer before-anneal dopant concentration and the third-layer dopant concentration are less than about 5×10 17 dopant atoms/cm 3 of an n-type dopant, and wherein the first-layer after-anneal dopant concentration and the second-layer after-anneal dopant concentration are at least about 5×10 19 dopant atoms/cm 3 .
19. The method of claim 1 , further comprising:
annealing the microelectronic structure.