Metal oxide materials and electrodes for Re-RAM
View Patent ↗Rewritable switching materials and methods for forming the same are described herein. One embodiment is a storage device comprising a first electrode, a state change element in contact with the first electrode, the state change element comprises Zr x Y y O z , and a second electrode in contact with the state change element. A method for forming such a storage device is also disclosed herein. Another embodiment is a storage device comprising a first electrode a state change element in contact with the first electrode, the state change comprises at least one of cerium oxide or bismuth oxide, and a second electrode in contact with the state change element. A method for forming such a storage device is also disclosed herein.
1. A storage device comprising:
a first electrode, the first electrode comprises at least one of TiN or TaN;
a state change element in direct contact with the first electrode, the state change element comprises Zr x Y y O z ; and
a second electrode in direct contact with the Zr x Y y O z of the state change element, the second electrode comprises at least one of LaMnO 3 , TaCN, or TiCN.
2. A storage device as recited in claim 1 wherein z is between 2x and 25 percent more than 2x.
3. A storage device as recited in claim 2 wherein the molar concentration of Y in Zr x Y y O z is between 5 percent and 15 percent.
4. A storage device as recited in claim 1 wherein the molar concentration of Y in Zr x Y y O z is between 5 percent and 15 percent.
5. A storage device as recited in claim 1 wherein the state change element comprises ZrO 2 that is doped with Y 2 O 3 .
6. A storage device as recited in claim 1 wherein the second electrode comprises LaMnO 3 doped with at least one of Sr or Ca.
7. A storage device comprising:
a first electrode;
a state change element in contact with the first electrode, the state change element has a low resistance state for SET and a high resistance state for RESET, the state change element comprises bismuth oxide; and
a second electrode in contact with the state change element, wherein the second electrode comprises at least one of cobalt oxide, TaCN, or TiCN.
8. The storage device of claim 7 , wherein the second electrode comprises cobalt oxide.
9. The storage device of claim 7 , wherein the second electrode comprises TaCN.
10. The storage device of claim 7 , wherein the second electrode comprises TiCN.
11. A storage device comprising:
a first electrode;
a metal oxide resistive state change element in contact with the first electrode, the state change element has a low resistance state for a first logical state and a high resistance state for a second logical state, the metal in the metal oxide is a metal other than a transition metal, the state change element comprises Ce 0 doped with Sm (Samarium); and
a second electrode in contact with the state change element.
12. A storage device as recited in claim 11 wherein the second electrode comprises at least one of LaMnO 3 , nickel oxide, TaCN, or TiCN.
13. A storage device as recited in claim 11 wherein the second electrode comprises cobalt oxide.
14. A storage device as recited in claim 11 wherein the second electrode comprises TaCN.
15. A storage device as recited in claim 11 wherein the second electrode comprises TiCN.
16. A method for forming a storage device comprising:
forming a first electrode, the first electrode comprises at least one of TiN or TaN;
forming a state change element in direct contact with the first electrode, the state change element has a low resistance state for SET and a high resistance state for RESET, the state change element comprises of Zr x Y y O z ; and
forming a second electrode in direct contact with the Zr x Y y O z of the state change element, the second electrode comprises at least one of LaMnO 3 , TaCN, or TiCN.
17. A method for forming a storage device as recited in claim 16 wherein z is between 2x and 25 percent more than 2x.
18. A method for forming a storage device as recited in claim 17 wherein the molar concentration of Y in Zr x Y y O z is between 5 percent and 15 percent.
19. A method for forming a storage device comprising:
forming a first electrode;
forming a resistive state change element in contact with the first electrode, the state change element has a low resistance state for a first logical state and a high resistance state for a second logical state, the state change element comprises bismuth oxide; and
forming a second electrode in contact with the state change element, wherein the second electrode comprises at least one of cobalt oxide, TaCN, or TiCN.
20. A method for forming a storage device as recited in claim 19 wherein the second electrode comprises TaCN.
21. A method for forming a storage device as recited in claim 19 wherein the second electrode comprises TiCN.
22. A method for forming a storage device comprising:
forming a first electrode;
forming a metal oxide resistive state change element in contact with the first electrode, the state change element has a low resistance state for a first logical state and a high resistance state for a second logical state, the metal in the metal oxide is a metal other than a transition metal, the state change element comprises Ce 0 doped with Sm (Samarium); and
forming a second electrode in contact with the state change element.
23. A method for forming a storage device as recited in claim 22 wherein the second electrode comprises TaCN.
24. A method for forming a storage device as recited in claim 22 wherein the second electrode comprises TiCN.