Method for separating a semiconductor wafer into individual semiconductor dies using an implanted impurity
View Patent ↗Provided is a method for separating a semiconductor wafer into individual semiconductor dies. The method for separating the semiconductor wafer, among other steps, may include implanting an impurity into regions of a semiconductor wafer proximate junctions where semiconductor dies join one another, the impurity configured to disrupt bonds in the semiconductor wafer proximate the junctions and lead to weakened regions. The method for separating the semiconductor wafer may further include separating the semiconductor wafer having the impurity into individual semiconductor dies along the weakened regions.
1. A method for separating a semiconductor wafer into individual semiconductor dies, comprising:
placing an impurity into regions of a surface of a semiconductor wafer proximate junctions where semiconductor dies join one another, the impurity configured to disrupt bonds in the semiconductor wafer proximate the junctions and lead to weakened regions;
removing a portion of an opposing surface of the semiconductor wafer after placing the impurity into the regions of the surface; and separating the semiconductor wafer having the impurity and the portion removed into individual semiconductor dies along the weakened regions;
wherein separating the semiconductor wafer includes separating the semiconductor wafer using mechanical or thermal stress.
2. The method of claim 1 wherein placing an impurity includes implanting rare gas ions into the regions.
3. The method of claim 1 wherein placing an impurity includes implanting hydrogen ions into the regions.
4. The method of claim 1 wherein the regions have a width of less than about 5 microns.
5. The method of claim 1 wherein the regions have a width of less than about 1 micron.
6. The method of claim 1 wherein the impurity is placed into the semiconductor wafer through openings in resist.
7. The method of claim 1 wherein the impurity is placed within scribe streets in the semiconductor wafer.
8. The method of claim 1 wherein separating the semiconductor wafer includes separating the semiconductor wafer using a roller to create the mechanical stress.
9. The method of claim 1 wherein the impurity is placed into a surface and further wherein the weakened regions extend substantially perpendicular to the surface.
10. A method for manufacturing semiconductor dies, comprising:
obtaining a semiconductor wafer; forming a plurality of semiconductor features on or in the semiconductor wafer; placing an impurity into regions of a surface of the semiconductor wafer proximate junctions where semiconductor dies join one another, the impurity configured to disrupt bonds in the semiconductor wafer proximate the junctions and lead to weakened regions;
removing a portion of an opposing surface of the semiconductor wafer after placing the impurity into the regions of the surface; and
separating the semiconductor wafer having the semiconductor features impurity and portions removed into individual semiconductor dies along the weakened regions;
wherein separating the semiconductor wafer includes separating the semiconductor wafer using mechanical or thermal stress.
11. The method of claim 10 wherein placing an impurity includes implanting rare gas ions into the regions.
12. The method of claim 10 wherein placing an impurity includes implanting hydrogen ions into the regions.
13. The method of claim 10 wherein the regions have a width of less than about 5 microns.
14. The method of claim 10 wherein the regions have a width of less than about 1 micron.
15. The method of claim 10 wherein the impurity is placed into the semiconductor wafer through openings in resist.
16. The method of claim 10 wherein the impurity is placed within scribe streets in the semiconductor wafer.
17. The method of claim 10 wherein separating the semiconductor wafer includes separating the semiconductor wafer using a roller to create the mechanical stress.
18. The method of claim 10 wherein the impurity is placed into a surface and further wherein the weakened regions extend substantially perpendicular to the surface.