Matrix lid heatspreader for flip chip package
View Patent ↗A method and apparatus are provided for manufacturing a lead frame based thermally enhanced flip chip package with an exposed heat spreader lid array ( 310 ) designed for direct attachment to an array of integrated circuit die ( 306 ) by including a thermal interface adhesion layer ( 308 ) to each die ( 306 ) and encapsulating the attached heat spreader lid array ( 310 ) and array of integrated circuit die ( 306 ) with mold compound ( 321 ) except for planar upper lid surfaces of the heat spreader lids ( 312 ).
1. A method of making a plurality of integrated circuit packages, comprising:
providing a substrate array comprising a plurality of flip chip mounted integrated circuit die, each having a first surface that is attached to a first surface of the substrate array using flip chip bumps and a second surface which is formed a compliant thermally conductive interface layer;
providing a heat spreader lid array comprising a plurality of heat spreader lids having planar upper lid surfaces connected together by connection spars to define one or more openings between adjacent heat spreader lids defining singulation cut areas around each head spreader lid;
attaching the heat spreader lid array to the substrate array by pressing the heat spreader lid array to compress the compliant thermally conductive interface layer formed on each integrated circuit die to expand laterally to form a compressed thermally conductive interface layer which completely covers the second surface of the die and make direct contact therebetween;
encapsulating the plurality of flip chip mounted integrated circuit die and the heat spreader lid array with encapsulant wherein the upper planar upper lid surfaces of the plurality of heat spreader lids are exposed; and
curing the encapsulant to form an array of molded packages, each having a portion of the substrate array exposed on a first side and a planar upper lid surface of a heat spreader lid exposed on a second side.
2. The method of claim 1 , further comprising:
singulating the array of molded packages into a plurality of integrated circuit packages.
3. The method of claim 1 , further comprising:
forming a plurality of ball grid arrays on an exposed surface of said substrate array to be electrically connected to conductive traces formed in the substrate array.
4. The method of claim 1 , further comprising forming the compliant thermally conductive interface layer by applying a thermally conductive, compliant adhesive layer or patterned layer of compliant, thermally conductive grease or non-curing silicon material to the second surface of each integrated circuit die.
5. The method of claim 1 , where providing the heat spreader lid array comprises selectively etching, machining, or stamping a metal layer to define a planar leadframe heat spreader lid array with the plurality of heat spreader lids and connection spars formed in a single planar layer.
6. The method of claim 1 , where providing the heat spreader lid array comprises providing a plurality of upset heat spreader lids connected together by a plurality of downset lead finger spars to define the one or more openings between adjacent heat spreader lids.
7. The method of claim 1 , where attaching the heat spreader lid array to the substrate array comprises pressing an upper mold cavity tool against a lower mold cavity tool and the planar upper lid surfaces of the heat spreader lid array to form a mold cavity between the upper and lower mold cavity and to attach the heat spreader lid array into contact with the thermally conductive interface layer formed on each integrated circuit die.
8. The method of claim 7 , further comprising lining an interior surface of the upper mold cavity with a polymer film before pressing the upper mold cavity tool against the lower mold cavity tool.
9. The method of claim 7 , where encapsulating the plurality of flip chip mounted integrated circuit die and the heat spreader lid array with encapsulant comprises:
filling the mold cavity with encapsulant except for the planar upper lid surfaces of the plurality of heat spreader lids; and
clamping the upper and lower mold cavity tools.
10. The method of claim 1 , where providing the heat spreader lid array comprises providing a plurality of upset heat spreader lids connected together by a plurality of downset lead finger spars, where each upset heat spreader lid is sized to make contact with a corresponding integrated circuit die through the compliant thermally conductive interface layer formed thereon.
11. A method of making a semiconductor package, comprising:
attaching a plurality of integrated circuit die to a molded array package substrate array using flip-chip bonding to enable electrical connection between each integrated circuit die and conductors in the substrate array;
providing a heat spreader lid array formed with an unlaminated thermally conductive material to define a plurality of heat spreader lids positioned for alignment with the plurality of integrated circuit die, where each heat spread lid comprises an exposed heat dissipation surface layer and a plurality of connection spars extending laterally from the exposed heat dissipation surface layer;
forming a compression-compliant thermal interface material layer on an exposed first surface of each of the plurality of integrated circuit die or on a bottom surface of each exposed heat dissipation surface layer;
pressing the heat spreader lid array into direct thermal contact with the plurality of integrated circuit die by compressing the compression-compliant thermal interface material layer to laterally expand to completely cover the first surface of each integrated circuit die and to define an encapsulation molding cavity region between the exposed heat dissipation surface layers and the substrate array;
filling the encapsulation molding cavity region with encapsulation mold compound material without covering the exposed heat dissipation surface layers with encapsulation mold compound material; and
curing the encapsulation mold compound material in the encapsulation molding cavity region to encapsulate the plurality of integrated circuit die and to seal the substrate array and heat spreader lid array, resulting in an array of molded packages, each having a portion of the heat spreader lid array exposed on a first side.
12. The method of claim 11 , further comprising:
singulating the array of molded packages into a plurality of integrated circuit packages.
13. The method of claim 11 , wherein the heat spreader lid array includes each exposed heat dissipation surface layer and connection spars extending laterally and formed in a single planar layer with said exposed heat dissipation surface layer.