IP Library Granted Patent US 9,546,945
Granted Patent B2
US 9,546,945 · App. 14/147,400 · Granted Jan 17, 2017

Methods and devices for active vibration damping of an optical structure

Inventors: Vyacheslav M. Ryaboy (Irvine, CA); Prakash S. Kasturi (Rancho Santa Margarita, CA); Adrian S. Nastase (Huntington Beach, CA)
Assignee: NEWPORT CORPORATION
G01N21/01B60N2/54F16F15/02F16F15/10G01M11/00
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Quick Facts
Patent No.
US 9,546,945
App. No.
14/147,400
Granted
Jan 17, 2017
Kind
B2
Abstract

A vibration damper assembly that may be attached and moved about a payload or optical mount surface of an optical structure such as an optical table. The vibration damper assembly may include a sensor and an actuator that may be disposed within a housing. In some embodiments, the vibration damper assembly or components thereof may be incorporated into an optical structure in the form of an optical component to be disposed or mounted on an optical mount surface of an optical structure such as an optical table. Embodiments of the vibration damper system may include a controller in communication with the damper assembly Embodiments of the controller may use adaptive tuning, auto-ranging selection of gain factors and other features in order to optimize damping performance.

Claims (21)

1. A method of automatically selecting an appropriate range of input vibration signal detection in an active vibration damper system, comprising:

providing a vibration damper system for an optical structure including a vibration sensor, an actuator and a controller coupled to both the vibration sensor and the actuator by a control channel and the controller having at least two vibration feedback signal inputs with gain factors appropriate to a signal strength range for the vibration feedback signal inputs;

monitoring an amplitude value of a vibration feedback signal from the vibration sensor;

comparing the amplitude value of the vibration feedback signal to a pre-selected range of signal values over a pre-selected period of time; and

switching the vibration feedback signal to an appropriate vibration feedback signal input with an appropriate gain factor for the amplitude value of the vibration feedback signal in the controller.

2. The method of claim 1 wherein the vibration feedback signal is switched to a lower gain vibration feedback signal input if the amplitude value of the vibration feedback signal was too high for the pre-selected range.

3. The method of claim 1 wherein the vibration feedback signal is switched to a higher gain vibration feedback signal input if the amplitude value of the vibration feedback signal was too low for the pre-selected range.

4. The method of claim 1 further comprising:

monitoring the vibration feedback signal and switching the vibration feedback signal to a vibration feedback signal input with a lowest gain factor;

detecting an amplitude of the vibration feedback signal that is still out of an acceptable range of vibration feedback signal amplitude values; and

determining whether a vibration overload condition exists for the active damper system.

5. The method of claim 4 wherein the controller is configured to generate an error signal when an overload condition exists and further comprising generating an error signal with the controller when it is determined that a vibration overload condition exists.

6. The method of claim 5 wherein the generation of an error signal comprises generating a visual error signal.

7. The method of claim 1 wherein monitoring the amplitude value of the vibration feedback signal from the vibration sensor comprises monitoring a mean-square amplitude value of the vibration feedback signal.

8. A method of determining a payload change with an active vibration damper system coupled to an optical structure, comprising:

providing an active vibration damper system including a vibration sensor, an actuator and a controller coupled to both the vibration sensor and the actuator by a control channel and the controller having a vibration feedback signal input with a gain factor appropriate to a signal strength range for the vibration feedback signal input;

monitoring a vibration feedback signal from the vibration sensor for vibration overload conditions;

detecting a vibration overload condition;

disabling a drive signal to the actuator from the controller; and

determining whether the vibration overload condition still exists.

9. The method of claim 8 wherein a determination of payload change is indicated by the controller to a user when the overload condition ceases to exist after the drive signal to the actuator from the controller is disabled.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 6, 2014
From: RYABOY, VYACHESLAV M.; KASTURI, PRAKASH S.; NASTASE, ADRIAN S.
To: NEWPORT CORPORATION
Reel/Frame 031894/0444 →
Continuity (4)
Division 13535745 · Jun 28, 2012
Division 11293439 · Dec 2, 2005
Provisional Application 60634227 · Dec 7, 2004
Related Publication 20140121844A1 · May 1, 2014