Semiconductor device and method of forming 3D dual side die embedded build-up semiconductor package
A semiconductor device has a plurality of semiconductor die. A substrate is provided with bumps disposed over the substrate. A first prefabricated insulating film is disposed between the semiconductor die and substrate. An interconnect structure is formed over the semiconductor die and first prefabricated insulating film. The bumps include a copper core encapsulated within copper plating. The first prefabricated insulating film includes glass cloth, glass fiber, or glass fillers. The substrate includes a conductive layer formed in the substrate and coupled to the bumps. The semiconductor die is disposed between the bumps of the substrate. The bumps and the semiconductor die are embedded within the first prefabricated insulating film. A portion of the first prefabricated insulating film is removed to expose the bumps. The bumps electrically connect the substrate to the interconnect structure.
1. A method of making a semiconductor device, comprising:
providing a plurality of semiconductor die;
providing a plurality of copper cores;
disposing a conductive material around the copper cores to form a plurality of bumps;
disposing the bumps over a substrate;
disposing a first prefabricated insulating film between the semiconductor die and substrate;
removing a portion of the first prefabricated insulating film, conductive material, and copper cores; and
forming an interconnect structure over the semiconductor die and first prefabricated insulating film including forming a first conductive layer contacting the first prefabricated insulating film, conductive material, and copper cores after removing the portion of the first prefabricated insulating film, conductive material, and copper cores.
2. The method of claim 1 , wherein the first prefabricated insulating film includes a fiber.
3. The method of claim 1 , further including forming a second conductive layer in the substrate and coupled to the bumps.
4. The method of claim 1 , further including disposing the semiconductor die between the bumps of the substrate with the bumps and semiconductor die embedded within the first prefabricated insulating film.
5. The method of claim 1 , further including disposing a second prefabricated insulating film over the first prefabricated insulating film.
6. A method of making a semiconductor device, comprising:
providing a semiconductor die;
providing a copper core;
disposing a conductive material around the copper core to form a bump;
disposing the bump over a substrate;
disposing a first insulating film over the substrate and bump;
disposing the substrate over the semiconductor die to embed the semiconductor die in the first insulating film; and
forming a first conductive layer contacting the conductive material, first insulating film, and a contact pad of the semiconductor die after embedding the semiconductor die in the first insulating film.
7. The method of claim 6 , further including disposing a second insulating film over the first insulating film.
8. The method of claim 6 , wherein the first insulating film is a multilayered reinforced film.
9. The method of claim 6 , further including forming an interconnect structure over the semiconductor die and bump.
10. The method of claim 9 , wherein forming the interconnect structure includes:
forming an insulating layer over the semiconductor die, first conductive layer, and first insulating film;
forming a plurality of openings in the insulating layer to expose the semiconductor die and bump; and
forming a second conductive layer within the openings of the insulating layer to couple the conductive layer to the bump and semiconductor die.
11. The method of claim 6 , further including removing a portion of the conductive material using laser direct ablation (LDA).
12. A method of making a semiconductor device, comprising:
providing a semiconductor die;
providing a conductive core;
disposing a conductive material around the conductive core to form a bump;
disposing the bump over a substrate;
disposing a first insulating film between the substrate and semiconductor die; and
removing a portion of the first insulating film over the bumps.
13. The method of claim 12 , further including disposing a second insulating film over the first insulating film.
14. The method of claim 12 , wherein the first insulating film is a multilayered reinforced film.
15. The method of claim 12 , wherein the conductive core includes copper.
16. The method of claim 12 , further including removing a portion of the conductive material using laser direct ablation (LDA).
17. The method of claim 12 , further including forming an interconnect structure over the semiconductor die and bump.
18. The method of claim 12 , wherein removing the portion of the first insulating film further includes using LDA.
19. A method of making a semiconductor device, comprising:
providing a semiconductor die;
providing a conductive core;
disposing a conductive material around the conductive core to form a bump;
disposing the bump over a substrate;
disposing a first insulating film between the substrate and semiconductor die; and
forming an opening in the conductive material.
20. The method of claim 19 , further including disposing a second insulating film over the first insulating film.
21. The method of claim 19 , wherein the first insulating film is a multilayered reinforced film.
22. The method of claim 19 , wherein the conductive core includes copper.
23. The method of claim 19 , wherein forming the opening in the conductive material further includes removing a portion of the conductive material using laser direct ablation (LDA).