Methods and systems to reduce location-based variations in switching characteristics of 3D ReRAM arrays
Methods for reducing location-based variations in the switching characteristics of memory cells within a memory array are described. In some cases, the resistance of an embedded resistor within each memory cell may be set to reduce the overall variation in series resistances for the memory cells within a memory array. For example, embedded resistors associated with far-far bits may be set to a lower resistance than embedded resistors associated with near-near bits. An embedded resistor may comprise a layer of polysilicon within a memory cell. Selective ion implantation may be used to reduce the embedded resistor resistance for memory cells within a particular region of the memory array and to form two or more different sets of embedded resistors within the memory array.
1. A method for manufacturing a semiconductor memory, comprising:
forming a first control line layer;
forming a memory element layer over the first control line layer;
forming an embedded resistor layer over the first control line layer, the embedded resistor layer includes a first portion associated with a first set of embedded resistors within a first region of a memory array and a second portion associated with a second set of embedded resistors within a second region of the memory array; and
performing a first doping process to the first portion subsequent to the forming an embedded resistor layer, the performing a first doping process causes the first set of embedded resistors to be less resistive than the second set of embedded resistors.
2. The method of claim 1 , wherein:
the performing a first doping process includes performing a selective ion implantation to the first set of embedded resistors.
3. The method of claim 2 , further comprising:
forming an oxide layer directly above the embedded resistor layer, the performing a selective ion implantation is performed subsequent to the forming an oxide layer.
4. The method of claim 1 , further comprising:
performing a second doping process to the first portion of the embedded resistor layer and to the second portion of the embedded resistor layer, the embedded resistor layer includes a third portion associated with a third set of embedded resistors within a third region of the memory array, the performing a second doping process causes the first set of embedded resistors to be less resistive than the second set of embedded resistors and the second set of embedded resistors to be less resistive than the third set of embedded resistors.
5. The method of claim 4 , wherein:
the first set of embedded resistors comprises in-situ doped and ion implanted polysilicon resistors with a first doping concentration; and
the second set of embedded resistors comprises in-situ doped and ion implanted polysilicon resistors with a second doping concentration that is less than the first doping concentration.
6. The method of claim 1 , wherein:
the first region of the memory array includes a first memory cell, the second region of the memory array includes a second memory cell, the performing a first doping process causes the series resistance in series with the first memory cell to be substantially the same as the series resistance in series with the second memory cell.
7. The method of claim 1 , wherein:
the first set of embedded resistors corresponds with memory cells within the first region in which the combination of word line and bit line resistance in series with the memory cells is greater than a resistance threshold; and
the second set of embedded resistors corresponds with memory cells within the second region in which the combination of word line and bit line resistance in series with the memory cells is less than the resistance threshold.
8. The method of claim 1 , wherein:
the first set of embedded resistors is associated with far-far bits within the memory array.
9. The method of claim 1 , further comprising:
forming a second control line layer over the embedded resistor layer; and
forming a steering element layer between the first control line layer and the second control line layer.
10. The method of claim 1 , wherein:
the first set of embedded resistors comprises polysilicon resistors with a first resistance; and
the second set of embedded resistors comprises polysilicon resistors with a second resistance greater than the first resistance.
11. The method of claim 1 , wherein:
the first region of the memory array is adjacent to the second region of the memory array.
12. The method of claim 1 , wherein:
the first region of the memory array includes a first plurality of memory cells that is connected to a first word line and a second plurality of memory cells that is connected to a second word line; and
the second region of the memory array includes a third plurality of memory cells that is connected to the first word line and a fourth plurality of memory cells that is connected to the second word line.
13. The method of claim 1 , wherein:
the first control line layer comprises a word line layer;
the memory element layer includes a ReRAM material; and
the embedded resistor layer comprises a layer of polysilicon.
14. The method of claim 1 , wherein:
the memory array is part of a non-volatile storage system, the memory array comprises a non-volatile memory that is monolithically formed in one or more physical levels of memory cells having active areas disposed above a silicon substrate, the non-volatile storage system includes circuitry associated with the operation of the memory array.
15. The method of claim 1 , wherein:
the memory array comprises a three-dimensional memory array.
16. A method for manufacturing a semiconductor memory, comprising:
depositing a first control line layer over a substrate;
depositing a memory element layer over the first control line layer;
depositing an embedded resistor layer over the first control line layer, the embedded resistor layer includes a first portion associated with a first set of embedded resistors and a second portion associated with a second set of embedded resistors, the first set of embedded resistors are embedded within a first set of memory cells, the second set of embedded resistors are embedded within a second set of memory cells, the first set of memory cells are connected to a first set of word lines and a first set of bit lines, the second set of memory cells are connected to a second set of word lines and a second set of bit lines, the first set of word lines are longer than the second set of word lines, the first set of bit lines are longer than the second set of bit line; and adjusting the first set of embedded resistors to be less resistive than the second set of embedded resistors, the adjusting the first set of embedded resistors includes performing a selective ion implantation to the first set of embedded resistors.